Reflectance anisotropy spectroscopy assessment of the MOVPE nucleation of GaInP on Germanium (100)

Barrigón Montañés, Enrique and Galiana Blanco, Beatriz and Rey-Stolle Prado, Ignacio (2011). Reflectance anisotropy spectroscopy assessment of the MOVPE nucleation of GaInP on Germanium (100). "Journal of Crystal Growth", v. 315 (n. 1); pp. 22-27. ISSN 0022-0248. https://doi.org/10.1016/j.jcrysgro.2010.09.038.

Description

Title: Reflectance anisotropy spectroscopy assessment of the MOVPE nucleation of GaInP on Germanium (100)
Author/s:
  • Barrigón Montañés, Enrique
  • Galiana Blanco, Beatriz
  • Rey-Stolle Prado, Ignacio
Item Type: Article
Título de Revista/Publicación: Journal of Crystal Growth
Date: January 2011
ISSN: 0022-0248
Volume: 315
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Electrónica Física
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

This work summarizes the observations made on the variation and time evolution of the reflectanceanisotropy signal during the MOVPE growth of GaInPnucleation layers on Germanium substrates. This in situ monitoring tool is used to assess the impact of different nucleation routines and reactor conditions on the quality of the layers grown. This comparison is carried out by establishing a correlation between reflectanceanisotropy signature at 2.1 eV and the morphology of the epilayers evaluated by atomic force microscopy (AFM). This paper outlines the potential of reflectanceanisotropy to predict, explore, and therefore optimize, the best growth conditions that lead to a high quality III–V epilayer on a Ge substrate

More information

Item ID: 11614
DC Identifier: http://oa.upm.es/11614/
OAI Identifier: oai:oa.upm.es:11614
DOI: 10.1016/j.jcrysgro.2010.09.038
Deposited by: Memoria Investigacion
Deposited on: 17 Jul 2012 07:48
Last Modified: 20 Apr 2016 19:38
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