AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

García-Gancedo, Luis; Zhu, Z.; Iborra Grau, Enrique; Clement Lorenzo, Marta; Olivares Roza, Jimena; Flewitt, A.J.; Milne, W.I.; Ashley, G.M.; Luo, J.K.; Zhao, X.B. y Lu, J.R. (2011). AlN-based BAW resonators with CNT electrodes for gravimetric biosensing. "Sensors and Actuators B: Chemical", v. 160 (n. 1); pp. 1386-1393. ISSN 0925-4005.


Título: AlN-based BAW resonators with CNT electrodes for gravimetric biosensing
  • García-Gancedo, Luis
  • Zhu, Z.
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Flewitt, A.J.
  • Milne, W.I.
  • Ashley, G.M.
  • Luo, J.K.
  • Zhao, X.B.
  • Lu, J.R.
Tipo de Documento: Artículo
Título de Revista/Publicación: Sensors and Actuators B: Chemical
Fecha: 2011
Volumen: 160
Palabras Clave Informales: Biosensor; Carbon nanotube (CNT); Aluminum nitride (AlN); Bulk acoustic wave resonator (BAW); Gravimetric biosensor
Escuela: E.T.S.I. Telecomunicación (UPM)
Departamento: Tecnología Electrónica [hasta 2014]
Licencias Creative Commons: Reconocimiento - Sin obra derivada - No comercial

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Solidly mounted resonators (SMRs) with a top carbon nanotubes (CNTs) surface coating that doubles as an electrode and as a sensing layer have been fabricated. The influence of the CNTs on the frequency response of the resonators was studied by direct comparison to identical devices with a top metallic electrode. It was found that the CNTs introduced significantly less mass load on the resonators and these devices exhibited a greater quality factor, Q (>2000, compared to ∼1000 for devices with metal electrodes), which increases the gravimetric sensitivity of the devices by allowing the tracking of smaller frequency shifts. Protein solutions with different concentrations were loaded on the top of the resonators and their responses to mass-load from physically adsorbed coatings were investigated. Results show that resonators using CNTs as the top electrode exhibited a higher frequency change for a given load (∼0.25 MHz cm2 ng−1) compared to that of a metal thin film electrode (∼0.14 MHz cm2 ng−1), due to the lower mass of the CNTelectrodes and their higher active surface area compared to that of a thin film metal electrode. It is therefore concluded that the use of CNTelectrodes on resonators for their use as gravimetric biosensors is a significant improvement over metallic electrodes that are normally employed.

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ID de Registro: 11764
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Identificador OAI:
Identificador DOI: 10.1016/j.snb.2011.09.083
URL Oficial:
Depositado por: Memoria Investigacion
Depositado el: 13 Nov 2012 14:13
Ultima Modificación: 22 Sep 2014 10:51
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