AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

García-Gancedo, Luis and Zhu, Z. and Iborra Grau, Enrique and Clement Lorenzo, Marta and Olivares Roza, Jimena and Flewitt, A.J. and Milne, W.I. and Ashley, G.M. and Luo, J.K. and Zhao, X.B. and Lu, J.R. (2011). AlN-based BAW resonators with CNT electrodes for gravimetric biosensing. "Sensors and Actuators B: Chemical", v. 160 (n. 1); pp. 1386-1393. ISSN 0925-4005. https://doi.org/10.1016/j.snb.2011.09.083.

Description

Title: AlN-based BAW resonators with CNT electrodes for gravimetric biosensing
Author/s:
  • García-Gancedo, Luis
  • Zhu, Z.
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Flewitt, A.J.
  • Milne, W.I.
  • Ashley, G.M.
  • Luo, J.K.
  • Zhao, X.B.
  • Lu, J.R.
Item Type: Article
Título de Revista/Publicación: Sensors and Actuators B: Chemical
Date: 2011
ISSN: 0925-4005
Volume: 160
Subjects:
Freetext Keywords: Biosensor; Carbon nanotube (CNT); Aluminum nitride (AlN); Bulk acoustic wave resonator (BAW); Gravimetric biosensor
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Solidly mounted resonators (SMRs) with a top carbon nanotubes (CNTs) surface coating that doubles as an electrode and as a sensing layer have been fabricated. The influence of the CNTs on the frequency response of the resonators was studied by direct comparison to identical devices with a top metallic electrode. It was found that the CNTs introduced significantly less mass load on the resonators and these devices exhibited a greater quality factor, Q (>2000, compared to ∼1000 for devices with metal electrodes), which increases the gravimetric sensitivity of the devices by allowing the tracking of smaller frequency shifts. Protein solutions with different concentrations were loaded on the top of the resonators and their responses to mass-load from physically adsorbed coatings were investigated. Results show that resonators using CNTs as the top electrode exhibited a higher frequency change for a given load (∼0.25 MHz cm2 ng−1) compared to that of a metal thin film electrode (∼0.14 MHz cm2 ng−1), due to the lower mass of the CNTelectrodes and their higher active surface area compared to that of a thin film metal electrode. It is therefore concluded that the use of CNTelectrodes on resonators for their use as gravimetric biosensors is a significant improvement over metallic electrodes that are normally employed.

More information

Item ID: 11764
DC Identifier: http://oa.upm.es/11764/
OAI Identifier: oai:oa.upm.es:11764
DOI: 10.1016/j.snb.2011.09.083
Official URL: http://www.sciencedirect.com/science/article/pii/S0925400511008859
Deposited by: Memoria Investigacion
Deposited on: 13 Nov 2012 14:13
Last Modified: 22 Sep 2014 10:51
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