Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.

Barbagini, Francesca and Bengoechea Encabo, Ana and Albert, Steven and Martinez Rodrigo, Javier and Sánchez García, Miguel Angel and Trampert, Achim and Calleja Pardo, Enrique (2011). Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.. "Nanoscale research letters", v. 6 (n. 1); pp. 632-641. ISSN 1556-276X.

Description

Title: Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.
Author/s:
  • Barbagini, Francesca
  • Bengoechea Encabo, Ana
  • Albert, Steven
  • Martinez Rodrigo, Javier
  • Sánchez García, Miguel Angel
  • Trampert, Achim
  • Calleja Pardo, Enrique
Item Type: Article
Título de Revista/Publicación: Nanoscale research letters
Date: December 2011
Volume: 6
Subjects:
Freetext Keywords: GaN nanocolumns, ordered growth, molecular beam epitaxy, surface cleaning, roughness, adhesion, e-beam lithography, colloidal lithography, focused ion beam
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Alternative locations

Official URL: http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264675/

Abstract

Precise and reproducible surface nanopatterning is the key for a successful ordered growth of GaN nanocolumns. In this work, we point out the main technological issues related to the patterning process, mainly surface roughness and cleaning, and mask adhesion to the substrate. We found that each of these factors, process-related, has a dramatic impact on the subsequent selective growth of the columns inside the patterned holes. We compare the performance of e-beam lithography, colloidal lithography, and focused ion beam in the fabrication of hole-patterned masks for ordered columnar growth. These results are applicable to the ordered growth of nanocolumns of different materials.

Funding Projects

TypeCodeAcronymLeaderTitle
FP7228999SMASHUnspecifiedSmart Nanostructured Semiconductors for Energy-Saving Light Solutions
Comunidad de MadridP2009/ESP-1503UnspecifiedUnspecifiedUnspecified

More information

Item ID: 11861
DC Identifier: http://oa.upm.es/11861/
OAI Identifier: oai:oa.upm.es:11861
Deposited by: Memoria Investigacion
Deposited on: 15 Oct 2012 09:45
Last Modified: 03 Dec 2014 09:35
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