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Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.

Barbagini, Francesca and Bengoechea Encabo, Ana and Albert, Steven and Martinez Rodrigo, Javier and Sánchez García, Miguel Angel and Trampert, Achim and Calleja Pardo, Enrique (2011) Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns. Nanoscale research letters, 6 (1). 632 - 641. ISSN 1556-276X

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Item Type:Article
Authors/Creators:
Creators NameCreators email (if known)
Barbagini, Francesca
Bengoechea Encabo, Ana
Albert, Steven
Martinez Rodrigo, Javier
Sánchez García, Miguel Angel
Trampert, Achim
Calleja Pardo, Enrique
Title:Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.
Publisher:Springer Verlag
Journal/Publication Title:Nanoscale research letters
Date:December 2011
Volume:6
Number:1
Department:Electronic Engineering
Faculty:E.T.S.I. Telecommunication (UPM)
Creative Commons licenses:Recognition - No derivative works - No commercial
Item ID:11861
Subjects:Telecommunications
Electronics

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Official URL: http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264675/

Abstract

Precise and reproducible surface nanopatterning is the key for a successful ordered growth of GaN nanocolumns. In this work, we point out the main technological issues related to the patterning process, mainly surface roughness and cleaning, and mask adhesion to the substrate. We found that each of these factors, process-related, has a dramatic impact on the subsequent selective growth of the columns inside the patterned holes. We compare the performance of e-beam lithography, colloidal lithography, and focused ion beam in the fabrication of hole-patterned masks for ordered columnar growth. These results are applicable to the ordered growth of nanocolumns of different materials.

Item Type:Article
Uncontrolled Keywords:GaN nanocolumns, ordered growth, molecular beam epitaxy, surface cleaning, roughness, adhesion, e-beam lithography, colloidal lithography, focused ion beam
Subjects:Telecommunications
Electronics
Código ID:11861
Depositado Por:Memoria Investigacion
Depositado el:15 Oct 2012 11:45
Last Modified:02 Jan 2013 18:37

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