Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.

Barbagini, Francesca and Bengoechea Encabo, Ana and Albert, Steven and Martinez Rodrigo, Javier and Sánchez García, Miguel Angel and Trampert, Achim and Calleja Pardo, Enrique (2011). Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.. "Nanoscale research letters", v. 6 (n. 1); pp.. ISSN 1556-276X.

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Title:Critical aspects of substrate nanopatterning for the ordered growth of GaN nanocolumns.
Authors/Creators:
Creators NameCreators email (if known)
Barbagini, FrancescaUNSPECIFIED
Bengoechea Encabo, AnaUNSPECIFIED
Albert, StevenUNSPECIFIED
Martinez Rodrigo, JavierUNSPECIFIED
Sánchez García, Miguel AngelUNSPECIFIED
Trampert, AchimUNSPECIFIED
Calleja Pardo, EnriqueUNSPECIFIED
Item Type:Article
Publisher:Springer Verlag
Título de Revista/Publicación:Nanoscale research letters
Date:December 2011
Volume:6
Number:1
Department:Electronic Engineering
Faculty:E.T.S.I. Telecomunicación (UPM)
Subjects:Telecommunications
Electronics
Freetext Keywords:GaN nanocolumns, ordered growth, molecular beam epitaxy, surface cleaning, roughness, adhesion, e-beam lithography, colloidal lithography, focused ion beam
Creative Commons Licenses:Recognition - No derivative works - Non commercial

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Official URL: http://www.ncbi.nlm.nih.gov/pmc/articles/PMC3264675/

Abstract

Precise and reproducible surface nanopatterning is the key for a successful ordered growth of GaN nanocolumns. In this work, we point out the main technological issues related to the patterning process, mainly surface roughness and cleaning, and mask adhesion to the substrate. We found that each of these factors, process-related, has a dramatic impact on the subsequent selective growth of the columns inside the patterned holes. We compare the performance of e-beam lithography, colloidal lithography, and focused ion beam in the fabrication of hole-patterned masks for ordered columnar growth. These results are applicable to the ordered growth of nanocolumns of different materials.

Item ID:11861
Deposited by: Memoria Investigacion
Deposited on:15 Oct 2012 09:45
Last Modified:22 Sep 2014 10:52

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