Sputter optimization of AlN on diamond substrates for high frequency SAW resonators

Rodriguez Madrid, Juan and Fuentes Iriarte, Gonzalo and Calle Gómez, Fernando and Araujo, Daniel and Villar, María Del Pilar and Williams, Oliver A. (2011). Sputter optimization of AlN on diamond substrates for high frequency SAW resonators. In: "8th Spanish Conference on Electron Devices, CDE'2011", 09/02/2011 - 11/02/2011, Palma de Mallorca, España. ISBN 978-1-4244-7863-7. pp. 1-4. https://doi.org/10.1109/SCED.2011.5744181.

Description

Title: Sputter optimization of AlN on diamond substrates for high frequency SAW resonators
Author/s:
  • Rodriguez Madrid, Juan
  • Fuentes Iriarte, Gonzalo
  • Calle Gómez, Fernando
  • Araujo, Daniel
  • Villar, María Del Pilar
  • Williams, Oliver A.
Item Type: Presentation at Congress or Conference (Article)
Event Title: 8th Spanish Conference on Electron Devices, CDE'2011
Event Dates: 09/02/2011 - 11/02/2011
Event Location: Palma de Mallorca, España
Title of Book: Proceedings of the 8th Spanish Conference on Electron Devices, CDE'2011
Date: 2011
ISBN: 978-1-4244-7863-7
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The AlN/diamond structure is an attractive combination for SAW devices and its application at high frequencies. In this work, the synthesis of AlN thin films by reactive sputtering has been optimized on diamond substrates in order to process high frequency devices. Polished microcrystalline and as-grown nanocrystalline diamond substrates have been used to deposit AlN of different thickness under equal sputtering conditions. For the smoother substrates, the FWHM of the rocking curve of the (002) AlN peak varies from 3.8° to 2.7° with increasing power. SAW one port resonators have been fabricated on these films, whose electrical characterization (in terms of S11 parameters) is reported.

More information

Item ID: 11973
DC Identifier: http://oa.upm.es/11973/
OAI Identifier: oai:oa.upm.es:11973
DOI: 10.1109/SCED.2011.5744181
Official URL: http://ieeexplore.ieee.org/xpls/abs_all.jsp?arnumber=5744181
Deposited by: Memoria Investigacion
Deposited on: 18 Dec 2012 17:52
Last Modified: 21 Apr 2016 11:10
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