Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors

Capilla Osorio, José and Olivares Roza, Jimena and Clement Lorenzo, Marta and Sangrador García, Jesús and Iborra Grau, Enrique and Devos, Arnaud (2011). Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors. In: "2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS)", 01/05/2011 - 05/05/2011, San Francisco, EE.UU.. ISBN 978-1-61284-111-3. pp. 1-6. https://doi.org/10.1109/FCS.2011.5977833.

Description

Title: Characterization of Amorphous Tantalum Oxide for Insulating Acoustic Mirrors
Author/s:
  • Capilla Osorio, José
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Sangrador García, Jesús
  • Iborra Grau, Enrique
  • Devos, Arnaud
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS)
Event Dates: 01/05/2011 - 05/05/2011
Event Location: San Francisco, EE.UU.
Title of Book: 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS)
Date: 2011
ISBN: 978-1-61284-111-3
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

This work describes the assessment of the acoustic properties of sputtered tantalum oxide films intended as high impedance films for the acoustic isolation of bulk acoustic wave devices operating in the GHz frequency range. The films are grown by sputtering a metallic tantalum target under different oxygen and argon gas mixtures, total pressures, pulsed DC powers and substrate bias. The structural properties of the films are assessed through infrared absorption spectroscopy and X-ray diffraction measurements. Their acoustic impedance is obtained after estimating the mass density by X-ray reflectometry measurements and the longitudinal acoustic velocity by analyzing the longitudinal λ/2 resonance induced in a tantalum oxide film inserted between an acoustic reflector and an AlN-based resonator. A second measurement of the sound velocity is achieved through picosecond acoustic spectroscopy.

More information

Item ID: 12630
DC Identifier: http://oa.upm.es/12630/
OAI Identifier: oai:oa.upm.es:12630
DOI: 10.1109/FCS.2011.5977833
Official URL: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=5959913
Deposited by: Memoria Investigacion
Deposited on: 02 Aug 2012 08:34
Last Modified: 21 Apr 2016 11:54
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