Multiple Frequency Solidly Mounted BAW Filters

Reinhardt, Alexandre and David, Jean-Baptiste and Fuchs, Christine and Clement Lorenzo, Marta and Olivares Roza, Jimena and Iborra Grau, Enrique and Rimmer, Nick and Burgess, Steve (2011). Multiple Frequency Solidly Mounted BAW Filters. In: "2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS)", 01/05/2011 - 05/05/2011, San Francisco, EE.UU.. ISBN 978-1-61284-111-3. pp. 1-5. https://doi.org/10.1109/FCS.2011.5977800.

Description

Title: Multiple Frequency Solidly Mounted BAW Filters
Author/s:
  • Reinhardt, Alexandre
  • David, Jean-Baptiste
  • Fuchs, Christine
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Iborra Grau, Enrique
  • Rimmer, Nick
  • Burgess, Steve
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS)
Event Dates: 01/05/2011 - 05/05/2011
Event Location: San Francisco, EE.UU.
Title of Book: 2011 Joint conference of the IEEE International Frequency Control and the European Frequency and Time Forum (FCS)
Date: 2011
ISBN: 978-1-61284-111-3
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

This paper reports the simultaneous fabrication of Receive and Transmit Bulk Acoustic Wave filters for the WCDMA standard on the same die. Both filters are based on Solidly Mounted Resonators using a common Bragg mirror, but with each having a specific piezoelectric film thickness. Electrical measurements reveal that the process steps required to provide the two different piezoelectric film thicknesses on the same die does not impact the electrical performances of resonators and filters and that this approach could thus be generalised to more than two filters.

More information

Item ID: 12632
DC Identifier: http://oa.upm.es/12632/
OAI Identifier: oai:oa.upm.es:12632
DOI: 10.1109/FCS.2011.5977800
Official URL: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=5959913
Deposited by: Memoria Investigacion
Deposited on: 02 Aug 2012 08:02
Last Modified: 21 Apr 2016 11:54
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