E-beam nanopatterning for the selective area growth of III-V nitride nanorods

Barbagini, Francesca and Martinez Rodrigo, Javier and Bengoechea Encabo, Ana and Albert, Steven and Sánchez García, Miguel Angel and Calleja Pardo, Enrique (2011). E-beam nanopatterning for the selective area growth of III-V nitride nanorods. In: "37th International Conference on Micro and Nano Engineering", 10/09/2011 - 23/09/2011, Berlin, Alemania. pp..

Description

Title: E-beam nanopatterning for the selective area growth of III-V nitride nanorods
Author/s:
  • Barbagini, Francesca
  • Martinez Rodrigo, Javier
  • Bengoechea Encabo, Ana
  • Albert, Steven
  • Sánchez García, Miguel Angel
  • Calleja Pardo, Enrique
Item Type: Presentation at Congress or Conference (Poster)
Event Title: 37th International Conference on Micro and Nano Engineering
Event Dates: 10/09/2011 - 23/09/2011
Event Location: Berlin, Alemania
Title of Book: Proceedings 37th International Conference on Micro and Nano Engineering, September 19-23, 2011,
Date: 2011
Subjects:
Faculty: Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

GaN/InGaN nanorods have attracted much scientific interest during the last decade because of their unique optical and electrical properties [1,2]. The high crystal quality and the absence of extended defects make them ideal candidates for the fabrication of high efficiency opto-electronic devices such as nano-photodetectors, light-emitting diodes, and solar cells [1-3]. Nitrides nanorods are commonly grown in the self-assembled mode by plasma-assisted molecular beam epitaxy (MBE) [4]. However, self-assembled nanorods are characterized by inhomogeneous heights and diameters, which render the device processing very difficult and negatively affect the electronic transport properties of the final device. For this reason, the selective area growth (SAG) mode has been proposed, where the nanorods preferentially grow on pre-defined sites on a pre-patterned substrate [5].

More information

Item ID: 12990
DC Identifier: http://oa.upm.es/12990/
OAI Identifier: oai:oa.upm.es:12990
Deposited by: Memoria Investigacion
Deposited on: 25 Jan 2013 12:41
Last Modified: 21 Apr 2016 12:17
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