Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon

Hofstetter, Jasmin and Fenning, David P. and Lelievre, Jean Francoise and Cañizo Nadal, Carlos del and Buonassisi, Tonio (2012). Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon. "Physica Status Solidi a-Applications And Materials Science", v. 209 (n. 10); pp. 1861-1865. ISSN 1862-6300. https://doi.org/10.1002/pssa.201200360.

Description

Title: Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon
Author/s:
  • Hofstetter, Jasmin
  • Fenning, David P.
  • Lelievre, Jean Francoise
  • Cañizo Nadal, Carlos del
  • Buonassisi, Tonio
Item Type: Article
Título de Revista/Publicación: Physica Status Solidi a-Applications And Materials Science
Date: 20 August 2012
ISSN: 1862-6300
Volume: 209
Subjects:
Freetext Keywords: defect engineering, gettering, silicon solar cells, simulation
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Electrónica Física
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The extraction of metal impurities during phosphorus diffusion gettering (PDG) is one of the crucial process steps when fabricating high-efficiency solar cells using low-cost, lower-purity silicon wafers. In this work, we show that for a given metal concentration, the size and density of metal silicide precipitates strongly influences the gettering efficacy. Different precipitate size distributions can be already found in silicon wafers grown by different techniques. In our experiment, however, the as-grown distribution of precipitated metals in multicrystalline Si sister wafers is engineered through different annealing treatments in order to control for the concentration and distribution of other defects. A high density of small precipitates is formed during a homogenization step, and a lower density of larger precipitates is formed during extended annealing at 740º C. After PDG, homogenized samples show a decreased interstitial iron concentration compared to as-grown and ripened samples, in agreement with simulations.

More information

Item ID: 15421
DC Identifier: http://oa.upm.es/15421/
OAI Identifier: oai:oa.upm.es:15421
DOI: 10.1002/pssa.201200360
Deposited by: Memoria Investigacion
Deposited on: 11 Jun 2013 16:46
Last Modified: 22 Sep 2014 11:07
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