Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon

Hofstetter, Jasmin; Fenning, David P.; Lelievre, Jean Francoise; Cañizo Nadal, Carlos del y Buonassisi, Tonio (2012). Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon. "Physica Status Solidi a-Applications And Materials Science", v. 209 (n. 10); pp. 1861-1865. ISSN 1862-6300. https://doi.org/10.1002/pssa.201200360.

Descripción

Título: Engineering metal precipitate size distributions to enhance gettering in multicrystalline silicon
Autor/es:
  • Hofstetter, Jasmin
  • Fenning, David P.
  • Lelievre, Jean Francoise
  • Cañizo Nadal, Carlos del
  • Buonassisi, Tonio
Tipo de Documento: Artículo
Título de Revista/Publicación: Physica Status Solidi a-Applications And Materials Science
Fecha: 20 Agosto 2012
Volumen: 209
Materias:
Palabras Clave Informales: defect engineering, gettering, silicon solar cells, simulation
Escuela: E.T.S.I. Telecomunicación (UPM)
Departamento: Electrónica Física
Licencias Creative Commons: Reconocimiento - Sin obra derivada - No comercial

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Resumen

The extraction of metal impurities during phosphorus diffusion gettering (PDG) is one of the crucial process steps when fabricating high-efficiency solar cells using low-cost, lower-purity silicon wafers. In this work, we show that for a given metal concentration, the size and density of metal silicide precipitates strongly influences the gettering efficacy. Different precipitate size distributions can be already found in silicon wafers grown by different techniques. In our experiment, however, the as-grown distribution of precipitated metals in multicrystalline Si sister wafers is engineered through different annealing treatments in order to control for the concentration and distribution of other defects. A high density of small precipitates is formed during a homogenization step, and a lower density of larger precipitates is formed during extended annealing at 740º C. After PDG, homogenized samples show a decreased interstitial iron concentration compared to as-grown and ripened samples, in agreement with simulations.

Más información

ID de Registro: 15421
Identificador DC: http://oa.upm.es/15421/
Identificador OAI: oai:oa.upm.es:15421
Identificador DOI: 10.1002/pssa.201200360
Depositado por: Memoria Investigacion
Depositado el: 11 Jun 2013 16:46
Ultima Modificación: 22 Sep 2014 11:07
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