Fabrication of luminescent nanostructures by electron-beam direct writing of PMMA resist

Angulo Barrios, Carlos and Carrasco, S. and Canalejas Tejero, Victor and López-Romero Moraleda, David and Navarro Villoslada, Fernando and Moreno-Bondi, M.C. and García Fierro, José Luis and Capel Sánchez, M.C. (2012). Fabrication of luminescent nanostructures by electron-beam direct writing of PMMA resist. "Materials Letters", v. 88 ; pp. 93-96. ISSN 0167-577X. https://doi.org/10.1016/j.matlet.2012.08.035.

Description

Title: Fabrication of luminescent nanostructures by electron-beam direct writing of PMMA resist
Author/s:
  • Angulo Barrios, Carlos
  • Carrasco, S.
  • Canalejas Tejero, Victor
  • López-Romero Moraleda, David
  • Navarro Villoslada, Fernando
  • Moreno-Bondi, M.C.
  • García Fierro, José Luis
  • Capel Sánchez, M.C.
Item Type: Article
Título de Revista/Publicación: Materials Letters
Date: December 2012
ISSN: 0167-577X
Volume: 88
Subjects:
Freetext Keywords: Organic luminiscent films; Nanophotonics; Nanotechnology; Electron-beam lithography; Organic resists; Poly(methylmethacrylate)
Faculty: Instituto de Sistemas Optoelectrónicos y Microtecnología (ISOM) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We report on the conversion of non-luminescent conventional poly(methylmethacrylate) (PMMA)-based electron-beam resists into luminescent materials when used as negative-tone resists, that is, when exposed to high electron irradiation doses. Raman spectroscopy reveals the chemical transformation induced by electron irradiation which is responsible for the observed luminescence in the visible (blue) region. The emission intensity from exposed PMMA-based patterns can be controlled by the electron irradiation dose employed to create them.

More information

Item ID: 15762
DC Identifier: http://oa.upm.es/15762/
OAI Identifier: oai:oa.upm.es:15762
DOI: 10.1016/j.matlet.2012.08.035
Official URL: http://www.sciencedirect.com/science/article/pii/S0167577X12011457
Deposited by: Memoria Investigacion
Deposited on: 22 Jul 2013 18:59
Last Modified: 01 Jan 2015 23:56
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