Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications

González Castilla, Sheila and Olivares Roza, Jimena and Clement Lorenzo, Marta and Iborra Grau, Enrique and Sangrador García, Jesús and Malo Gomez, Javier and Izpura Torres, José Ignacio (2008). Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications. "Applied Physics Letters", v. 92 (n. 18); pp. 183506-1. ISSN 0003-6951. https://doi.org/10.1063/1.2924284.

Description

Title: Electrical detection of the mechanical resonances in AlN-actuated microbridges for mass sensing applications
Author/s:
  • González Castilla, Sheila
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Iborra Grau, Enrique
  • Sangrador García, Jesús
  • Malo Gomez, Javier
  • Izpura Torres, José Ignacio
Item Type: Article
Título de Revista/Publicación: Applied Physics Letters
Date: May 2008
ISSN: 0003-6951
Volume: 92
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We report the fabrication and frequency characterization of mechanical resonators piezoelectrically actuated with aluminum nitride films. The resonators consist of a freestanding unimorph structure made up of a metal/AlN/metal piezoelectric stack and a Si3N4 supporting layer. We show that the electrical impedance of the one-port device can be used to assess the vibrational behavior of the resonators, provided that the modes do not exhibit specific symmetries, for which the impedance variations cancel. Frequency shifts arise when loading the resonators with small masses. As gravimetric sensors, the microbridges exhibit mass sensitivities of 0.18 fg/Hz for vibrational modes around 2 MHz.

More information

Item ID: 2483
DC Identifier: http://oa.upm.es/2483/
OAI Identifier: oai:oa.upm.es:2483
DOI: 10.1063/1.2924284
Official URL: http://scitation.aip.org/content/aip/journal/apl/92/18/10.1063/1.2924284
Deposited by: Memoria Investigacion
Deposited on: 04 Mar 2010 10:13
Last Modified: 27 Nov 2015 08:41
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