Radiation heat savings in polysilicon production: validation of results through a CVD laboratory prototype

Ramos Cabal, Alba and Cañizo Nadal, Carlos del and Valdehita Torija, Javier and Zamorano Saavedra, Juan Carlos and Luque López, Antonio (2013). Radiation heat savings in polysilicon production: validation of results through a CVD laboratory prototype. "Journal of Crystal Growth", v. 374 ; pp. 5-10. ISSN 0022-0248. https://doi.org/10.1016/j.jcrysgro.2013.03.043.

Description

Title: Radiation heat savings in polysilicon production: validation of results through a CVD laboratory prototype
Author/s:
  • Ramos Cabal, Alba
  • Cañizo Nadal, Carlos del
  • Valdehita Torija, Javier
  • Zamorano Saavedra, Juan Carlos
  • Luque López, Antonio
Item Type: Article
Título de Revista/Publicación: Journal of Crystal Growth
Date: July 2013
ISSN: 0022-0248
Volume: 374
Subjects:
Freetext Keywords: A1. Radiation; A3. Chemical vapor deposition processes; B1. Polysilicon; B2. Solar grade silicon
Faculty: Instituto de Energía Solar (IES) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

Full text

[img]
Preview
PDF - Requires a PDF viewer, such as GSview, Xpdf or Adobe Acrobat Reader
Download (3MB)

Abstract

This work aims at a deeper understanding of the energy loss phenomenon in polysilicon production reactors by the so-called Siemens process. Contributions to the energy consumption of the polysilicon deposition step are studied in this paper, focusing on the radiation heat loss phenomenon. A theoretical model for radiation heat loss calculations is experimentally validated with the help of a laboratory CVD prototype. Following the results of the model, relevant parameters that directly affect the amount of radiation heat losses are put forward. Numerical results of the model applied to a state-of-the-art industrial reactor show the influence of these parameters on energy consumption due to radiation per kilogram of silicon produced; the radiation heat loss can be reduced by 3.8% when the reactor inner wall radius is reduced from 0.78 to 0.70 m, by 25% when the wall emissivity is reduced from 0.5 to 0.3, and by 12% when the final rod diameter is increased from 12 to 15 cm.

More information

Item ID: 26089
DC Identifier: http://oa.upm.es/26089/
OAI Identifier: oai:oa.upm.es:26089
DOI: 10.1016/j.jcrysgro.2013.03.043
Official URL: http://www.sciencedirect.com/science/article/pii/S0022024813002327
Deposited by: Memoria Investigacion
Deposited on: 19 May 2014 18:19
Last Modified: 01 Aug 2015 22:56
  • Logo InvestigaM (UPM)
  • Logo GEOUP4
  • Logo Open Access
  • Open Access
  • Logo Sherpa/Romeo
    Check whether the anglo-saxon journal in which you have published an article allows you to also publish it under open access.
  • Logo Dulcinea
    Check whether the spanish journal in which you have published an article allows you to also publish it under open access.
  • Logo de Recolecta
  • Logo del Observatorio I+D+i UPM
  • Logo de OpenCourseWare UPM