Simulation and laser vibrometry characterization of piezoelectric AlN thin films

Hernando García, Jorge and Sánchez de Rojas Aldavero, José Luis and González Castilla, Sheila and Iborra Grau, Enrique and Ababneh, A. and Schmid, U. (2008). Simulation and laser vibrometry characterization of piezoelectric AlN thin films. "Journal of Applied Physics", v. 104 (n. 5); pp. 53502-1. ISSN 0021-8979. https://doi.org/10.1063/1.2957081.

Description

Title: Simulation and laser vibrometry characterization of piezoelectric AlN thin films
Author/s:
  • Hernando García, Jorge
  • Sánchez de Rojas Aldavero, José Luis
  • González Castilla, Sheila
  • Iborra Grau, Enrique
  • Ababneh, A.
  • Schmid, U.
Item Type: Article
Título de Revista/Publicación: Journal of Applied Physics
Date: September 2008
ISSN: 0021-8979
Volume: 104
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In this paper, the electric field induced deformations of sputter-deposited piezoelectric aluminum nitride thin films sandwiched between electrodes on top of a silicon substrate are studied by numerical calculations and scanning laser interferometric measurements. In our calculations based on the finite element method, the results show the displacement of the top and bottom surfaces of both the thin film and the substrate, for either a free or a perfectly clamped structure. The confirmation that the bottom surface of the film is deformed reveals the limitations of techniques that only access the top surface, as well as the double-beam interferometric configuration, under specific conditions. In addition, the simulations demonstrate the dependence of the displacements on the size of the upper electrode and the contribution of the transverse piezoelectric coefficient d31 to the features of the displacement profiles. A laser scanning vibrometry technique was used to measure deformations on the top surface with subpicometer vertical resolution. By comparing the calculated and the experimental displacement profiles, an advanced approach is discussed to obtain accurate quantitative information of both coefficients d31 and d33.

More information

Item ID: 2618
DC Identifier: http://oa.upm.es/2618/
OAI Identifier: oai:oa.upm.es:2618
DOI: 10.1063/1.2957081
Official URL: http://jap.aip.org/
Deposited by: Memoria Investigacion
Deposited on: 18 Mar 2010 10:45
Last Modified: 20 Apr 2016 12:15
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