Heat losses in a CVD reactor for polysilicon: comprehensive model and experimental validation

Ramos Cabal, Alba and Rodríguez Rodríguez, Araceli and Cañizo Nadal, Carlos del and Valdehita Torija, Javier and Zamorano Saavedra, Juan Carlos and Luque López, Antonio (2014). Heat losses in a CVD reactor for polysilicon: comprehensive model and experimental validation. "Journal of Crystal Growth", v. 402 ; ISSN 0022-0248. https://doi.org/10.1016/j.jcrysgro.2014.05.020.

Description

Title: Heat losses in a CVD reactor for polysilicon: comprehensive model and experimental validation
Author/s:
  • Ramos Cabal, Alba
  • Rodríguez Rodríguez, Araceli
  • Cañizo Nadal, Carlos del
  • Valdehita Torija, Javier
  • Zamorano Saavedra, Juan Carlos
  • Luque López, Antonio
Item Type: Article
Título de Revista/Publicación: Journal of Crystal Growth
Date: 14 September 2014
ISSN: 0022-0248
Volume: 402
Subjects:
Freetext Keywords: B1. Polysilicon; A3. Chemical vapour deposition (CVD); A1. Heat transfer mechanisms; B2. Solar grade silicon
Faculty: Instituto de Energía Solar (IES) (UPM)
Department: Otro
UPM's Research Group: Silicio y Nuevos Conceptos para Células Solares
Creative Commons Licenses: Recognition - Non commercial - Share

Full text

[img]
Preview
PDF - Requires a PDF viewer, such as GSview, Xpdf or Adobe Acrobat Reader
Download (405kB) | Preview

Abstract

This work addresses heat losses in a CVD reactor for polysilicon production. Contributions to the energy consumption of the so-called Siemens process are evaluated, and a comprehensive model for heat loss is presented. A previously-developed model for radiative heat loss is combined with conductive heat loss theory and a new model for convective heat loss. Theoretical calculations are developed and theoretical energy consumption of the polysilicon deposition process is obtained. The model is validated by comparison with experimental results obtained using a laboratory-scale CVD reactor. Finally, the model is used to calculate heat consumption in a 36-rod industrial reactor; the energy consumption due to convective heat loss per kilogram of polysilicon produced is calculated to be 22-30 kWh/kg along a deposition process.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainIPT 2012-0340-120000UnspecifiedUnspecifiedUnspecified

More information

Item ID: 30078
DC Identifier: http://oa.upm.es/30078/
OAI Identifier: oai:oa.upm.es:30078
DOI: 10.1016/j.jcrysgro.2014.05.020
Official URL: https://www.sciencedirect.com/science/article/pii/S0022024814003662
Deposited by: Profesor Titular Carlos del Cañizo Nadal
Deposited on: 18 Jun 2014 10:04
Last Modified: 11 Apr 2019 10:37
  • Logo InvestigaM (UPM)
  • Logo GEOUP4
  • Logo Open Access
  • Open Access
  • Logo Sherpa/Romeo
    Check whether the anglo-saxon journal in which you have published an article allows you to also publish it under open access.
  • Logo Dulcinea
    Check whether the spanish journal in which you have published an article allows you to also publish it under open access.
  • Logo de Recolecta
  • Logo del Observatorio I+D+i UPM
  • Logo de OpenCourseWare UPM