Uncertainty Estimation for Performance Evaluation of a Confocal Microscope as Metrology Equipment

Guarneros, O. and Vicente Oliva, Jesús de and Maya, M. and Ocaña Moreno, José Luis and Molpeceres Álvarez, Carlos Luis and García-Ballesteros Ramírez, Juan José and Rodríguez, S. R. and Duran, H. M. (2014). Uncertainty Estimation for Performance Evaluation of a Confocal Microscope as Metrology Equipment. "Mapan-Journal of Metrology Society of India", v. 29 (n. 1); pp. 29-42. ISSN 0970-3950. https://doi.org/10.1007/s12647-013-0060-2.

Description

Title: Uncertainty Estimation for Performance Evaluation of a Confocal Microscope as Metrology Equipment
Author/s:
  • Guarneros, O.
  • Vicente Oliva, Jesús de
  • Maya, M.
  • Ocaña Moreno, José Luis
  • Molpeceres Álvarez, Carlos Luis
  • García-Ballesteros Ramírez, Juan José
  • Rodríguez, S. R.
  • Duran, H. M.
Item Type: Article
Título de Revista/Publicación: Mapan-Journal of Metrology Society of India
Date: March 2014
Volume: 29
Subjects:
Freetext Keywords: Metrology; Confocal microscopy; Uncertainty; Traceability
Faculty: E.T.S.I. Industriales (UPM)
Department: Física Aplicada [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Both in industry and research, the quality control of micrometric manufactured parts is based on the measurement of parameters whose traceability is sometimes difficult to guarantee. In some of these parts, the confocal microscopy shows great aptitudes to characterize a measurand qualitatively and quantitatively. The confocal microscopy allows the acquisition of 2D and 3D images that are easily manipulated. Nowadays, this equipment is manufactured by many different brands, each of them claiming a resolution probably not in accord to their real performance. The Laser Center (Technical University of Madrid) has a confocal microscope to verify the dimensions of the micro mechanizing in their own research projects. The present study pretends to confirm that the magnitudes obtained are true and reliable. To achieve this, a methodology for confocal microscope calibration is proposed, as well as an experimental phase for dimensionally valuing the equipment by 4 different standard positions, with its seven magnifications and the six objective lenses that the equipment currently has, in the x–y and z axis. From the results the uncertainty will be estimated along with an effect analysis of the different magnifications in each of the objective lenses.

More information

Item ID: 33230
DC Identifier: http://oa.upm.es/33230/
OAI Identifier: oai:oa.upm.es:33230
DOI: 10.1007/s12647-013-0060-2
Official URL: http://link.springer.com/article/10.1007/s12647-013-0060-2
Deposited by: Memoria Investigacion
Deposited on: 17 Apr 2015 15:04
Last Modified: 21 Aug 2017 11:38
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