Deep reactive ion etching of auxetic structures: present capabilities and challenges

Diaz Lantada, Andres and Muslija, Alban (2014). Deep reactive ion etching of auxetic structures: present capabilities and challenges. "Smart Materials and Structures", v. 23 (n. 8); pp. 1-7. ISSN 0964-1726. https://doi.org/10.1088/0964-1726/23/8/087001.

Description

Title: Deep reactive ion etching of auxetic structures: present capabilities and challenges
Author/s:
  • Diaz Lantada, Andres
  • Muslija, Alban
Item Type: Article
Título de Revista/Publicación: Smart Materials and Structures
Date: August 2014
ISSN: 0964-1726
Volume: 23
Subjects:
Freetext Keywords: Auxetics; Negative Poisson ratio; Metamaterials; Morphing structures
Faculty: E.T.S.I. Industriales (UPM)
Department: Ingeniería Mecánica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Auxetic materials (or metamaterials) have negative Poisson ratios (NPR) and display the unexpected properties of lateral expansion when stretched, and equal and opposing densification when compressed. Such auxetic materials are being used more frequently in the development of novel products, especially in the fields of intelligent expandable actuators, shape-morphing structures, and minimally invasive implantable devices. Although several micromanufacturing technologies have already been applied to the development of auxetic materials and devices, additional precision is needed to take full advantage of their special mechanical properties. In this study, we present a very promising approach for the development of auxetic materials and devices based on the use of deep reactive ion etching (DRIE). The process stands out for its precision and its potential applications to mass production. To our knowledge, it represents the first time this technology has been applied to the manufacture of auxetic materials with nanometric details. We take into account the present capabilities and challenges linked to the use of DRIE in the development of auxetic materials and auxetic-based devices.

Funding Projects

TypeCodeAcronymLeaderTitle
FP7226460EUMINAfabKarlsruher Institut fur TechnologieIntegrating European research infrastructures for micro-nano fabrication of functional structures and devices out of a knowledge-based multimaterials repertoire

More information

Item ID: 35846
DC Identifier: http://oa.upm.es/35846/
OAI Identifier: oai:oa.upm.es:35846
DOI: 10.1088/0964-1726/23/8/087001
Official URL: http://iopscience.iop.org/article/10.1088/0964-1726/23/8/087001
Deposited by: Memoria Investigacion
Deposited on: 09 Mar 2016 11:55
Last Modified: 11 Mar 2016 07:35
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