Silicon micromachined waveguide components at 0.75 to 1.1 THz

Reck, Theodore and Jung-Kubiak, Cecile and Leal Sevillano, Carlos Alberto and Chattopadhyay, Goutam (2014). Silicon micromachined waveguide components at 0.75 to 1.1 THz. In: "39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz 2014)", 14/09/2014 - 19/09/2014, Tucson, Arizona, EE.UU. pp. 1-2. https://doi.org/10.1109/IRMMW-THz.2014.6956008.

Description

Title: Silicon micromachined waveguide components at 0.75 to 1.1 THz
Author/s:
  • Reck, Theodore
  • Jung-Kubiak, Cecile
  • Leal Sevillano, Carlos Alberto
  • Chattopadhyay, Goutam
Item Type: Presentation at Congress or Conference (Article)
Event Title: 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz 2014)
Event Dates: 14/09/2014 - 19/09/2014
Event Location: Tucson, Arizona, EE.UU
Title of Book: 39th International Conference on Infrared, Millimeter, and Terahertz waves (IRMMW-THz 2014)
Date: 2014
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Señales, Sistemas y Radiocomunicaciones
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Silicon micromachined waveguide components operating in the WM-250 (WR-1) waveguide band (0.75 to 1.1 THz) are measured. Through lines are used to characterize the waveguide loss with and without an oxide etch to reduce the surface roughness. A sidewall roughness of 100nm is achieved, enabling a waveguide loss of 0.2dB/mm. A 1THz band-pass filter is also measured to characterize the precision of fabrication process. A 1.8% shift in frequency is observed and can be accounted for by the 0.5deg etch angle and 2um expansion of the features by the oxide etch. The measured filter has a 13% 3dB bandwidth and 2.5dB insertion loss through the passband.

More information

Item ID: 36623
DC Identifier: http://oa.upm.es/36623/
OAI Identifier: oai:oa.upm.es:36623
DOI: 10.1109/IRMMW-THz.2014.6956008
Deposited by: Memoria Investigacion
Deposited on: 22 Jul 2015 18:14
Last Modified: 22 Jul 2015 18:14
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