BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions

Iborra Grau, Enrique and Clement Lorenzo, Marta and Olivares Roza, Jimena and González Castilla, Sheila and Sangrador García, Jesús and Rimmer, Nick and Rastogi, A. and Ivira, B. and Reinhardt, Alexandre (2008). BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions. In: "2008 IEEE International Ultrasonics Symposium", 02/11/2008-05/11/2008, Pekin, China. ISBN 978-1-4244-2428-3.

Description

Title: BAW Resonators Based on AlN with Ir Electrodes for Digital Wireless Transmissions
Author/s:
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • González Castilla, Sheila
  • Sangrador García, Jesús
  • Rimmer, Nick
  • Rastogi, A.
  • Ivira, B.
  • Reinhardt, Alexandre
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2008 IEEE International Ultrasonics Symposium
Event Dates: 02/11/2008-05/11/2008
Event Location: Pekin, China
Title of Book: Proceedings of 2008 IEEE International Ultrasonics Symposium Proceedings
Date: 2 November 2008
ISBN: 978-1-4244-2428-3
Subjects:
Freetext Keywords: Iridium, AlN, BAW resonator, BAW filter.
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We investigate the performance of aluminum nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) electrodes for applications in WCDMA filters. Ir/AlN/Ir stacks are grown on top of insulating Bragg mirrors composed of alternate λ/4 layers of silicon oxycarbide (SiOC) and silicon nitride (Si3N4). We have developed the technological processes for the fabrication of filters including the trimming of the Ir top electrode for the tuning of the bandwidth. The influence of the thickness of the top electrode after the tuning process in the performance of the SMRs and filters is analyzed. The performance of the devices is compared with that of SMRs and filters of identical design made with Mo electrodes.

More information

Item ID: 3854
DC Identifier: http://oa.upm.es/3854/
OAI Identifier: oai:oa.upm.es:3854
Official URL: http://ieeexplore.ieee.org/stamp/stamp.jsp?arnumber=04803331
Deposited by: Memoria Investigacion
Deposited on: 29 Jul 2010 10:51
Last Modified: 20 Apr 2016 13:18
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