Advanced determination of piezoelectric properties of AlN thin films on silicon substrates

Sánchez de Rojas Aldavero, José Luis and Hernando García, Jorge and Ababneh, A. and Schmid, U. and Olivares Roza, Jimena and Iborra Grau, Enrique and Clement Lorenzo, Marta (2008). Advanced determination of piezoelectric properties of AlN thin films on silicon substrates. In: "2008 IEEE International Ultrasonics Symposium", 02/11/2008-05/11/2008, Beijing, China. ISBN 978-1-4244-2428-3. pp. 903-906. https://doi.org/10.1109/ULTSYM.2008.0218.

Description

Title: Advanced determination of piezoelectric properties of AlN thin films on silicon substrates
Author/s:
  • Sánchez de Rojas Aldavero, José Luis
  • Hernando García, Jorge
  • Ababneh, A.
  • Schmid, U.
  • Olivares Roza, Jimena
  • Iborra Grau, Enrique
  • Clement Lorenzo, Marta
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2008 IEEE International Ultrasonics Symposium
Event Dates: 02/11/2008-05/11/2008
Event Location: Beijing, China
Title of Book: Ultrasonics Symposium, 2008. IUS 2008. IEEE
Date: November 2008
ISBN: 978-1-4244-2428-3
Subjects:
Freetext Keywords: Piezoelectric constants; Aluminum Nitride; vibromete
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Piezoelectric deformations of thin, aluminum nitride (AlN) layers, on top of a silicon substrate, were studied by numerical calculations and interferometric measurements. Our calculation by finite element method demonstrates that substrate deformation under the top electrode may be comparable to the electric field induced deformation in the thin AlN layer, for a given applied voltage. Simulations also show the effect of a clamped or free substrate condition and the relative contributions of d33 and d31 piezoelectric constants. A Laser scanning vibrometry technique was used to measure deformations in the top surface with sub-picometer vertical resolution. By comparing calculations and experimental data, quantitative information about both d33 and d31 constants can be obtained.

More information

Item ID: 3858
DC Identifier: http://oa.upm.es/3858/
OAI Identifier: oai:oa.upm.es:3858
DOI: 10.1109/ULTSYM.2008.0218
Official URL: http://ieeexplore.ieee.org/xpl/mostRecentIssue.jsp?punumber=4798694
Deposited by: Memoria Investigacion
Deposited on: 23 Jul 2010 08:17
Last Modified: 20 Apr 2016 13:18
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