Piezoelectric characterization of ain thin films on silicon substrates

Hernando García, Jorge and Sánchez de Rojas Aldavero, José Luis and Ababneh, A. and Schmid, U. and González Castilla, Sheila and Iborra Grau, Enrique (2008). Piezoelectric characterization of ain thin films on silicon substrates. In: "XXII Eurosensors 2008", 07/09/2008-10/09/2008, Dresde, Alemania. ISBN 978-3-00-025217-4.

Description

Title: Piezoelectric characterization of ain thin films on silicon substrates
Author/s:
  • Hernando García, Jorge
  • Sánchez de Rojas Aldavero, José Luis
  • Ababneh, A.
  • Schmid, U.
  • González Castilla, Sheila
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: XXII Eurosensors 2008
Event Dates: 07/09/2008-10/09/2008
Event Location: Dresde, Alemania
Title of Book: CD-ROM Proceedings of XXII Eurosensors 2008
Date: 7 September 2008
ISBN: 978-3-00-025217-4
Subjects:
Freetext Keywords: piezoelectric, AlN, vibrometer
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

Full text

[img]
Preview
PDF - Requires a PDF viewer, such as GSview, Xpdf or Adobe Acrobat Reader
Download (138kB) | Preview

Abstract

The electric field induced deformations of thin piezoelectric, aluminium nitride (AlN) layers, on top ofa silicon substrate, were studied by numerical calculations and interferometric measurements. Our calculationby finite element method demonstrates that substrate deformation under the top electrode may be comparableto the deformation in the thin AlN layer, for a given applied voltage. Simulations also show the effect of aclamped or free substrate condition and the relative contributions of d33 and d31 piezoelectric constants. ALaser scanning vibrometry technique was used to measure deformations in the top surface with sub-picometervertical resolution. By comparing calculations and experimental data, quantitative information about both d31and d33 constants can be obtained.

More information

Item ID: 3916
DC Identifier: http://oa.upm.es/3916/
OAI Identifier: oai:oa.upm.es:3916
Official URL: http://www.eurosensors2008.com/
Deposited by: Memoria Investigacion
Deposited on: 06 Sep 2010 08:32
Last Modified: 20 Apr 2016 13:20
  • Logo InvestigaM (UPM)
  • Logo GEOUP4
  • Logo Open Access
  • Open Access
  • Logo Sherpa/Romeo
    Check whether the anglo-saxon journal in which you have published an article allows you to also publish it under open access.
  • Logo Dulcinea
    Check whether the spanish journal in which you have published an article allows you to also publish it under open access.
  • Logo de Recolecta
  • Logo del Observatorio I+D+i UPM
  • Logo de OpenCourseWare UPM