Hernando García, Jorge and Sánchez de Rojas Aldavero, José Luis and Ababneh, A. and Schmid, U. and González Castilla, Sheila and Iborra Grau, Enrique (2008) Piezoelectric characterization of ain thin films on silicon substrates. In: XXII Eurosensors 2008, 07/09/2008-10/09/2008, Dresde, Alemania.
Ver estadisticas de descargas para este eprint (solo desde ordenadores de la UPM)
| Item Type: | Presentation at Congress or Day (Article) | ||||||||||||||
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Authors/Creators: |
| ||||||||||||||
| Title: | Piezoelectric characterization of ain thin films on silicon substrates | ||||||||||||||
| Event Title: | XXII Eurosensors 2008 | ||||||||||||||
| Event Dates: | 07/09/2008-10/09/2008 | ||||||||||||||
| Event Location: | Dresde, Alemania | ||||||||||||||
| Title of Book: | CD-ROM Proceedings of XXII Eurosensors 2008 | ||||||||||||||
| Publisher: | VDI | ||||||||||||||
| Date: | 07 September 2008 | ||||||||||||||
| ISBN: | 978-3-00-025217-4 | ||||||||||||||
| Department: | Electronics Technology | ||||||||||||||
| Faculty: | E.T.S.I. Telecommunication (UPM) | ||||||||||||||
| Creative Commons licenses: | Recognition - No derivative works - No commercial | ||||||||||||||
| Item ID: | 3916 | ||||||||||||||
| Subjects: | Electronics Physics |
Texto completo disponible como:
![[img]](/style/images/fileicons/pdf.png)
| PDF 135Kb - Idioma: Español |
Official URL: http://www.eurosensors2008.com/
Abstract
The electric field induced deformations of thin piezoelectric, aluminium nitride (AlN) layers, on top ofa silicon substrate, were studied by numerical calculations and interferometric measurements. Our calculationby finite element method demonstrates that substrate deformation under the top electrode may be comparableto the deformation in the thin AlN layer, for a given applied voltage. Simulations also show the effect of aclamped or free substrate condition and the relative contributions of d33 and d31 piezoelectric constants. ALaser scanning vibrometry technique was used to measure deformations in the top surface with sub-picometervertical resolution. By comparing calculations and experimental data, quantitative information about both d31and d33 constants can be obtained.
| Item Type: | Presentation at Congress or Day (Article) |
|---|---|
| Uncontrolled Keywords: | piezoelectric, AlN, vibrometer |
| Subjects: | Electronics Physics |
| Código ID: | 3916 |
| Depositado Por: | Memoria Investigacion |
| Depositado el: | 06 Sep 2010 10:32 |
| Last Modified: | 06 Sep 2010 10:32 |
Sólo para Personal del Archivo: editar este registro
