Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes

Clement Lorenzo, Marta and Olivares Roza, Jimena and Iborra Grau, Enrique and González Castilla, Sheila and Sangrador García, Jesús and Rimmer, Nick and Rastogi, A. and Ivira, B. and Reinhardt, Alexandre (2008). Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes. In: "22nd European Frequency and Time Forum (EFTF) 2008", 22/04/2008-25/04/2008, Toulouse, Francia.

Description

Title: Aluminium Nitride Solidly Mounted BAW Resonators with Iridium Electrodes
Author/s:
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Iborra Grau, Enrique
  • González Castilla, Sheila
  • Sangrador García, Jesús
  • Rimmer, Nick
  • Rastogi, A.
  • Ivira, B.
  • Reinhardt, Alexandre
Item Type: Presentation at Congress or Conference (Article)
Event Title: 22nd European Frequency and Time Forum (EFTF) 2008
Event Dates: 22/04/2008-25/04/2008
Event Location: Toulouse, Francia
Title of Book: Proceedings of 22nd European Frequency and Time Forum (EFTF) 2008
Date: 22 April 2008
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Tecnología Electrónica [hasta 2014]
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In this work we investigated the performance of aluminium nitride (AlN)-based solidly mounted resonators (SMR) made with iridium (Ir) bottom electrodes. Ir/AlN/metal stacks were grown on top of insulating Bragg mirrors composed of alternate λ/4 layers of silicon oxi-carbide (SiOC) and silicon nitride (Si3N4).Ir electrodes of various thicknesses were electron-beam evaporated on different adhesion layers, which also acted as seed layers. AlN was deposited by sputtering after conditioning the Ir electrode by a soft-etch with Ar+ ions, which was essential to achieve high quality AlN films. The structure and morphology of the different layers were analysed by x-ray diffraction (XRD) and atomic force microscopy (AFM). The frequency response of the SMRs was assessed by measuring the input scattering parameterS11 with a network analyzer. The experimental results were fitted to the Butterworth-Van Dyke circuital model. The effective electromechanical coupling factor k2eff, and the quality factor Q of the resonators were derived from the experimental data. The influence of the thickness, crystal quality and roughness of the Ir bottom electrodes on the performance of the resonators was investigated.

More information

Item ID: 3928
DC Identifier: http://oa.upm.es/3928/
OAI Identifier: oai:oa.upm.es:3928
Official URL: http://www.eftf.org/proceedings/PDFs/FPE-0159.pdf
Deposited by: Memoria Investigacion
Deposited on: 02 Sep 2010 08:50
Last Modified: 20 Apr 2016 13:20
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