Dissolution of electrically inactive phosphorus by low temperature annealing

Peral Boiza, Ana and Dastgheib-Shirazi, Amir and Wagner, Hannes and Hahn, Giso and Cañizo Nadal, Carlos del (2015). Dissolution of electrically inactive phosphorus by low temperature annealing. "Energy Procedia", v. 77 ; pp. 311-315. ISSN 1876-6102. https://doi.org/10.1016/j.egypro.2015.07.040.

Description

Title: Dissolution of electrically inactive phosphorus by low temperature annealing
Author/s:
  • Peral Boiza, Ana
  • Dastgheib-Shirazi, Amir
  • Wagner, Hannes
  • Hahn, Giso
  • Cañizo Nadal, Carlos del
Item Type: Article
Título de Revista/Publicación: Energy Procedia
Date: 2015
ISSN: 1876-6102
Volume: 77
Subjects:
Freetext Keywords: Phosphorus Diffusion Gettering; Electrically Inactive Phosphorus; Gettering; Iron; Low Temperature Annealing
Faculty: Instituto de Energía Solar (IES) (UPM)
Department: Otro
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In this study we investigate the dissolution of electrically inactive phosphorus complexes by low temperature annealing after the POCl3 diffusion process. This has the immediate consequence that the existing near-surface emitter volume SRH recombination can be reduced. Thereby, a significant reduction of emitter saturation current density j0E is achieved without driving the emitter further into the silicon substrate. For short-term temperature treatments well below the POCl3 diffusion temperature, a reduction of up to -60 fA/cm2 has been achieved. This study increases our understanding of the formation and dissolution of electrically inactive phosphorus complexes during post-annealing processes.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainTEC2011-28423-C03UnspecifiedUnspecifiedUnspecified
Madrid Regional GovernmentS2013/MAE-2780MADRID-PVUnspecifiedUnspecified
Government of SpainEEBB-I-14-08268UnspecifiedUnspecifiedUnspecified

More information

Item ID: 41001
DC Identifier: http://oa.upm.es/41001/
OAI Identifier: oai:oa.upm.es:41001
DOI: 10.1016/j.egypro.2015.07.040
Official URL: http://www.sciencedirect.com/science/article/pii/S1876610215008085
Deposited by: Memoria Investigacion
Deposited on: 05 Sep 2016 17:17
Last Modified: 06 Jun 2019 13:01
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