The influence of MOVPE growth conditions on the shell of core-shell GaN microrod structures

Schimpke, Tilman and Avramesc, Adrian and Koller, Andreas and Fernando Saavedra, Amalia and Hartmann, Janna and Ledig, Johannes and Waag, Andreas and Strassburg, Martin and Lugauer, Hans-Jürgen (2016). The influence of MOVPE growth conditions on the shell of core-shell GaN microrod structures. "Journal of Crystal Growth", v. 465 ; pp. 34-42. ISSN 0022-0248. https://doi.org/10.1016/j.jcrysgro.2017.02.035.

Description

Title: The influence of MOVPE growth conditions on the shell of core-shell GaN microrod structures
Author/s:
  • Schimpke, Tilman
  • Avramesc, Adrian
  • Koller, Andreas
  • Fernando Saavedra, Amalia
  • Hartmann, Janna
  • Ledig, Johannes
  • Waag, Andreas
  • Strassburg, Martin
  • Lugauer, Hans-Jürgen
Item Type: Article
Título de Revista/Publicación: Journal of Crystal Growth
Date: May 2016
ISSN: 0022-0248
Volume: 465
Subjects:
Freetext Keywords: Microrod; MOVPE; Gallium nitride; Growth kinetics; Core-shell; Tapering; Thickness gradient; Three-dimensional
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

Full text

[img]
Preview
PDF - Requires a PDF viewer, such as GSview, Xpdf or Adobe Acrobat Reader
Download (5MB) | Preview

Abstract

A core-shell geometry is employed for most next-generation, three-dimensional opto-electric devices based on III–V semiconductors and grown by metal organic vapor phase epitaxy (MOVPE). Controlling the shape of the shell layers is fundamental for device optimization, however no detailed analysis of the influence of growth conditions has been published to date. We study homogeneous arrays of gallium nitride core-shell microrods with height and diameter in the micrometer range and grown in a two-step selective area MOVPE process. Changes in shell shape and homogeneity effected by deliberately altered shell growth conditions were accurately assessed by digital analysis of high-resolution scanning electron microscope images. Most notably, two temperature regimes could be established, which show a significantly different behavior with regard to material distribution. Above 900 °C of wafer carrier temperature, the shell thickness along the growth axis of the rods was very homogeneous, however variations between vicinal rods increase. In contrast, below 830 °C the shell thickness is higher close to the microrod tip than at the base of the rods, while the lateral homogeneity between neighboring microrods is very uniform. This temperature effect could be either amplified or attenuated by changing the remaining growth parameters such as reactor pressure, structure distance, gallium precursor, carrier gas composition and dopant materials. Possible reasons for these findings are discussed with respect to GaN decomposition as well as the surface and gas phase diffusion of growth species, leading to an improved control of the functional layers in next-generation 3D V–III devices.

More information

Item ID: 46214
DC Identifier: http://oa.upm.es/46214/
OAI Identifier: oai:oa.upm.es:46214
DOI: 10.1016/j.jcrysgro.2017.02.035
Official URL: http://dx.doi.org/10.1016/j.jcrysgro.2017.02.035
Deposited by: Memoria Investigacion
Deposited on: 03 Jun 2017 08:11
Last Modified: 01 Jun 2019 22:30
  • Logo InvestigaM (UPM)
  • Logo GEOUP4
  • Logo Open Access
  • Open Access
  • Logo Sherpa/Romeo
    Check whether the anglo-saxon journal in which you have published an article allows you to also publish it under open access.
  • Logo Dulcinea
    Check whether the spanish journal in which you have published an article allows you to also publish it under open access.
  • Logo de Recolecta
  • Logo del Observatorio I+D+i UPM
  • Logo de OpenCourseWare UPM