Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement

Li, Chuang and Cordovilla Baró, Francisco and Ocaña Moreno, José Luis (2018). Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement. "Solid-State Electronics", v. 139 ; pp. 39-47. ISSN 0038-1101. https://doi.org/10.1016/j.sse.2017.09.012.

Description

Title: Design optimization and fabrication of a novel structural piezoresistive pressure sensor for micro-pressure measurement
Author/s:
  • Li, Chuang
  • Cordovilla Baró, Francisco
  • Ocaña Moreno, José Luis
Item Type: Article
Título de Revista/Publicación: Solid-State Electronics
Date: January 2018
ISSN: 0038-1101
Volume: 139
Subjects:
Freetext Keywords: MEMS piezoresistive pressure sensor; Four-beams-bossed-membrane; Finite element analysis; Sensitivity; Pressure nonlinearity
Faculty: E.T.S.I. Industriales (UPM)
Department: Física Aplicada e Ingeniería de Materiales
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

This paper presents a novel structural piezoresistive pressure sensor with a four-beams-bossed-membrane (FBBM) structure that consisted of four short beams and a central mass to measure micro-pressure. The proposed structure can alleviate the contradiction between sensitivity and linearity to realize the micro measurement with high accuracy. In this study, the design, fabrication and test of the sensor are involved. By utilizing the finite element analysis (FEA) to analyze the stress distribution of sensitive elements and subsequently deducing the relationships between structural dimensions and mechanical performance, the optimization process makes the sensor achieve a higher sensitivity and a lower pressure nonlinearity. Based on the deduced equations, a series of optimized FBBM structure dimensions are ultimately determined. The designed sensor is fabricated on a silicon wafer by using traditional MEMS bulk-micromachining and anodic bonding technology. Experimental results show that the sensor achieves the sensitivity of 4.65 mV/V/kPa and pressure nonlinearity of 0.25% FSS in the operating range of 0–5 kPa at room temperature, indicating that this novel structure sensor can be applied in measuring the absolute micro pressure lower than 5 kPa.

Funding Projects

TypeCodeAcronymLeaderTitle
Unspecified201508320275UnspecifiedChina Scholarship Council for studying abroadUnspecified
Unspecified2015-1-ES01-KA107-015460UnspecifiedUnspecifiedErasmus+ project

More information

Item ID: 49811
DC Identifier: http://oa.upm.es/49811/
OAI Identifier: oai:oa.upm.es:49811
DOI: 10.1016/j.sse.2017.09.012
Official URL: https://www.sciencedirect.com/journal/solid-state-electronics/vol/139/suppl/C
Deposited by: Memoria Investigacion
Deposited on: 26 Apr 2018 15:00
Last Modified: 01 Feb 2020 23:30
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