Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators

Munir, Junaid and Mirea, Teona and Miguel Ramos, Mario de and Saeed, M. A. and Bin Shaari, Amiruddin and Iborra Grau, Enrique (2016). Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators. "Ultrasonics", v. 74 ; pp. 153-160. ISSN 0041-624X. https://doi.org/10.1016/j.ultras.2016.10.010.

Description

Title: Effects of compensating the temperature coefficient of frequency with the acoustic reflector layers on the overall performance of solidly mounted resonators
Author/s:
  • Munir, Junaid
  • Mirea, Teona
  • Miguel Ramos, Mario de
  • Saeed, M. A.
  • Bin Shaari, Amiruddin
  • Iborra Grau, Enrique
Item Type: Article
Título de Revista/Publicación: Ultrasonics
Date: 18 October 2016
ISSN: 0041-624X
Volume: 74
Subjects:
Freetext Keywords: Solidly mounted resonators, Temperature coefficient of frequency, Acoustic reflectors, Finite Element Analysis
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Thin film acoustic wave resonator based devices require compensation of temperature coefficient of frequency (TCF) in many applications. This work presents the design and fabrication of temperature compensated solidly mounted resonators (SMRs). The characteristics of each material of the layered structure have an effect on the device TCF but depending on the relative position with respect to the piezoelectric material in the stack. The influence of material properties of the different layers composing the device on the TCF is discussed in detail. TCF behavior simulation is done with Mason?s model and, to take into account the deterioration of overall performance due to the finite lateral size and shape of the resonator, we have used 2D and 3D finite element modelling of the resonators. The overall behavior of the device for external loads is predicted. SMRs are designed according to simulations and fabricated with different configurations to obtain TCF as near to zero as possible with an optimized response. Resonators are made by depositing Mo/AlN/Mo piezoelectric stacks on acoustic reflectors. As reflector materials, conductive W and insulating WOx films have been used as high acoustic impedance materials. SiO2 films are used as low acoustic impedance material.

Funding Projects

TypeCodeAcronymLeaderTitle
FP7304814RAPTADIAGUnspecifiedRapid Aptamer based diagnostics for bacterial meningitis
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 50071
DC Identifier: http://oa.upm.es/50071/
OAI Identifier: oai:oa.upm.es:50071
DOI: 10.1016/j.ultras.2016.10.010
Official URL: https://www.sciencedirect.com/science/article/pii/S0041624X16302268?via%3Dihub
Deposited by: Memoria Investigacion
Deposited on: 21 Apr 2018 08:56
Last Modified: 25 Mar 2019 15:52
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