Frequency response of AlN-based solidly mounted resonators under mechanical stress

Clement Lorenzo, Marta and Delicado, A. and Olivares Roza, Jimena and Mirea, Teona and Sangrador García, Jesús and Iborra Grau, Enrique (2017). Frequency response of AlN-based solidly mounted resonators under mechanical stress. "Sensors and actuators A-Physical", v. 258 ; pp. 39-43. ISSN 0924-4247. https://doi.org/10.1016/j.sna.2017.02.028.

Description

Title: Frequency response of AlN-based solidly mounted resonators under mechanical stress
Author/s:
  • Clement Lorenzo, Marta
  • Delicado, A.
  • Olivares Roza, Jimena
  • Mirea, Teona
  • Sangrador García, Jesús
  • Iborra Grau, Enrique
Item Type: Article
Título de Revista/Publicación: Sensors and actuators A-Physical
Date: 1 May 2017
ISSN: 0924-4247
Volume: 258
Subjects:
Freetext Keywords: AlN resonator, Mechanical strain, Frequency variation
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

We analyse the performance of solidly mounted bulk acoustic wave resonators under induced mechanical stress to explore their viability as strain sensors. The resonators are made of polycrystalline AlN piezoelectric thin films containing uniformly tilted microcrystals to excite both longitudinal and shear modes. The resonators are grown on top of silicon bars that are fixed at one or two edges using two home-made apparatus specifically designed to induce deformations of several hundreds of microstrains. The induced strain causes frequency shifts of tenths of MHz, yielding strain coefficients of the resonant frequency (SCF) up to −71% per unit strain (−0.71 ppm/e). The influence of the nature of the resonant mode (shear of longitudinal), the electromechanical coupling factor and the operation frequency on the SCF is analysed.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedUnspecified

More information

Item ID: 50079
DC Identifier: http://oa.upm.es/50079/
OAI Identifier: oai:oa.upm.es:50079
DOI: 10.1016/j.sna.2017.02.028
Official URL: https://www.sciencedirect.com/science/article/pii/S0924424716308561?via%3Dihub
Deposited by: Memoria Investigacion
Deposited on: 24 Apr 2018 18:03
Last Modified: 01 Jul 2019 22:30
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