The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators

Munir, Junaid; Miguel Ramos, Mario de; Lee, Hyunjoo Jenny; Saeed, Mohammad Alam y Iborra Grau, Enrique (2017). The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators. "Journal of microelectromechanical systems", v. 26 (n. 6); pp. 1306-1315. ISSN 1057-7157. https://doi.org/10.1109/JMEMS.2017.2737641.

Descripción

Título: The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators
Autor/es:
  • Munir, Junaid
  • Miguel Ramos, Mario de
  • Lee, Hyunjoo Jenny
  • Saeed, Mohammad Alam
  • Iborra Grau, Enrique
Tipo de Documento: Artículo
Título de Revista/Publicación: Journal of microelectromechanical systems
Fecha: Diciembre 2017
Volumen: 26
Materias:
Palabras Clave Informales: Solidly mounted resonators (SMRs), temperature coefficient of frequency (TCF), mason model, finite element modeling (FEM)
Escuela: E.T.S.I. Telecomunicación (UPM)
Departamento: Ingeniería Electrónica
Licencias Creative Commons: Reconocimiento - Sin obra derivada - No comercial

Texto completo

[img]
Vista Previa
PDF (Document Portable Format) - Se necesita un visor de ficheros PDF, como GSview, Xpdf o Adobe Acrobat Reader
Descargar (4MB) | Vista Previa

Resumen

Most of the applications of solidly mounted resonator need the compensation of temperature coefficient of resonant frequency. The presence of materials with different properties in the stack makes it complicated to explain the influence of each material individually on temperature coefficient. To reduce design and fabrication costs, an accurate and precise modeling of the resonators is required. In this paper, Mason model and finite-element analysis are used to design the resonators and results for both models, which are almost similar, are presented. Different kinds of configuration (symmetric and asymmetric, according to the thickness of the layers) are designed to achieve the temperature coefficient of frequency as near-zero as possible with an optimized response. Such designs are fabricated and characterized obtaining measurements of the temperature coefficient of frequency. The result shows that useful and reliable information on the performance of resonators can be achieved with accurate modeling.

Más información

ID de Registro: 50080
Identificador DC: http://oa.upm.es/50080/
Identificador OAI: oai:oa.upm.es:50080
Identificador DOI: 10.1109/JMEMS.2017.2737641
URL Oficial: https://ieeexplore.ieee.org/document/8013681/
Depositado por: Memoria Investigacion
Depositado el: 30 Abr 2018 15:17
Ultima Modificación: 30 Abr 2018 15:17
  • GEO_UP4
  • Open Access
  • Open Access
  • Sherpa-Romeo
    Compruebe si la revista anglosajona en la que ha publicado un artículo permite también su publicación en abierto.
  • Dulcinea
    Compruebe si la revista española en la que ha publicado un artículo permite también su publicación en abierto.
  • Recolecta
  • InvestigaM
  • Observatorio I+D+i UPM
  • OpenCourseWare UPM