The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators

Munir, Junaid and Miguel Ramos, Mario de and Lee, Hyunjoo Jenny and Saeed, Mohammad Alam and Iborra Grau, Enrique (2017). The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators. "Journal of microelectromechanical systems", v. 26 (n. 6); pp. 1306-1315. ISSN 1057-7157. https://doi.org/10.1109/JMEMS.2017.2737641.

Description

Title: The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators
Author/s:
  • Munir, Junaid
  • Miguel Ramos, Mario de
  • Lee, Hyunjoo Jenny
  • Saeed, Mohammad Alam
  • Iborra Grau, Enrique
Item Type: Article
Título de Revista/Publicación: Journal of microelectromechanical systems
Date: December 2017
Volume: 26
Subjects:
Freetext Keywords: Solidly mounted resonators (SMRs), temperature coefficient of frequency (TCF), mason model, finite element modeling (FEM)
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Most of the applications of solidly mounted resonator need the compensation of temperature coefficient of resonant frequency. The presence of materials with different properties in the stack makes it complicated to explain the influence of each material individually on temperature coefficient. To reduce design and fabrication costs, an accurate and precise modeling of the resonators is required. In this paper, Mason model and finite-element analysis are used to design the resonators and results for both models, which are almost similar, are presented. Different kinds of configuration (symmetric and asymmetric, according to the thickness of the layers) are designed to achieve the temperature coefficient of frequency as near-zero as possible with an optimized response. Such designs are fabricated and characterized obtaining measurements of the temperature coefficient of frequency. The result shows that useful and reliable information on the performance of resonators can be achieved with accurate modeling.

Funding Projects

TypeCodeAcronymLeaderTitle
FP7304814RAPTADIAGUnspecifiedRapid diagnosis of meningitis
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedUnspecified

More information

Item ID: 50080
DC Identifier: http://oa.upm.es/50080/
OAI Identifier: oai:oa.upm.es:50080
DOI: 10.1109/JMEMS.2017.2737641
Official URL: https://ieeexplore.ieee.org/document/8013681/
Deposited by: Memoria Investigacion
Deposited on: 30 Apr 2018 15:17
Last Modified: 25 Mar 2019 10:33
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