Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured AI electrodes

Rughoobur, Girish and Miguel Ramos, Mario de and Escolano Moyano, José Miguel and Iborra Grau, Enrique and Flewitt, Andrew John (2017). Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured AI electrodes. "Scientific Reports", v. 7 (n. 1367); pp. 1-9. ISSN 2045-2322. https://doi.org/10.1038/s41598-017-01545-2.

Description

Title: Gravimetric sensors operating at 1.1 GHz based on inclined c-axis ZnO grown on textured AI electrodes
Author/s:
  • Rughoobur, Girish
  • Miguel Ramos, Mario de
  • Escolano Moyano, José Miguel
  • Iborra Grau, Enrique
  • Flewitt, Andrew John
Item Type: Article
Título de Revista/Publicación: Scientific Reports
Date: 2017
ISSN: 2045-2322
Volume: 7
Subjects:
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Shear mode solidly mounted resonators (SMRs) are fabricated using an inclined c-axis ZnO grown on a rough Al electrode. The roughness of the Al surface is controlled by changing the substrate temperature during the deposition process to promote the growth of inclined ZnO microcrystals. The optimum substrate temperature to obtain homogeneously inclined c-axis grains in ZnO films is achieved by depositing Al at 100°C with a surface roughness ~9.2nm, which caused an inclination angle of ~25° of the ZnO c-axis with respect to the surface normal. Shear mode devices with quality-factors at resonance, Qr and effective electromechanical coupling factors, keff 2 , as high as 180 and 3.4% are respectively measured. Mass sensitivities, Sm of (4.9±0.1)kHz • cm2/ng and temperature coefficient of frequency (TCF) of ~−67ppm/K are obtained using this shear mode. The performance of the devices as viscosity sensors and biosensors is demonstrated by determining the frequency shifts of water-ethanol mixtures and detection of Rabbit immunoglobin G (IgG) whole molecule (H&L) respectively.

Funding Projects

TypeCodeAcronymLeaderTitle
Horizon 2020636820RECOBAUnspecifiedCross-sectorial real-time sensing, advanced control and optimisation of batch processes saving energy and raw materials
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedUnspecified

More information

Item ID: 50081
DC Identifier: http://oa.upm.es/50081/
OAI Identifier: oai:oa.upm.es:50081
DOI: 10.1038/s41598-017-01545-2
Official URL: https://www.nature.com/articles/s41598-017-01545-2
Deposited by: Memoria Investigacion
Deposited on: 30 Apr 2018 15:30
Last Modified: 25 Mar 2019 10:58
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