Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications

Fu, Y. Q. and Luo, J. K. and Nguyen, N. T. and Walton, A. J. and Flewitt, Andrew John and Zu, X. T. and Li, Y. and McHale, G. and Matthews, A. and Iborra Grau, Enrique and Du, H. and Milne, W.I. (2017). Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications. "Progress in materials science" (n. 89); pp. 31-91. ISSN 0079-6425. https://doi.org/10.1016/j.pmatsci.2017.04.006.

Description

Title: Advances in piezoelectric thin films for acoustic biosensors, acoustofluidics and lab-on-chip applications
Author/s:
  • Fu, Y. Q.
  • Luo, J. K.
  • Nguyen, N. T.
  • Walton, A. J.
  • Flewitt, Andrew John
  • Zu, X. T.
  • Li, Y.
  • McHale, G.
  • Matthews, A.
  • Iborra Grau, Enrique
  • Du, H.
  • Milne, W.I.
Item Type: Article
Título de Revista/Publicación: Progress in materials science
Date: 24 April 2017
Subjects:
Freetext Keywords: Piezoelectric, Thin film, Acoustic wave, Biosensor, Microfluidics, Acoustofluidics, Lab-on-chip, ZnO, AlN
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Recently, piezoelectric thin films including zinc oxide (ZnO) and aluminium nitride (AlN) have found a broad range of lab-on-chip applications such as biosensing, particle/cell concentrating, sorting/patterning, pumping, mixing, nebulisation and jetting. Integrated acoustic wave sensing/microfluidic devices have been fabricated by depositing these piezo- electric films onto a number of substrates such as silicon, ceramics, diamond, quartz, glass, and more recently also polymer, metallic foils and bendable glass/silicon for making flex- ible devices. Such thin film acoustic wave devices have great potential for implementing integrated, disposable, or bendable/flexible lab-on-a-chip devices into various sensing and actuating applications. This paper discusses the recent development in engineering high performance piezoelectric thin films, and highlights the critical issues such as film deposition, MEMS processing techniques, control of deposition/processing parametres, film texture, doping, dispersion effects, film stress, multilayer design, electrode materials/ designs and substrate selections. Finally, advances in using thin film devices for lab-on- chip applications are summarised and future development trends are identified.

Funding Projects

TypeCodeAcronymLeaderTitle
FP7304814RAPTADIAGUnspecifiedRapid Aptamer based diagnostics for bacterial meningitis
Government of SpainMAT2010-18933UnspecifiedUnspecifiedUnspecified
Government of SpainMAT2013-45957RUnspecifiedUnspecifiedUnspecified

More information

Item ID: 50083
DC Identifier: http://oa.upm.es/50083/
OAI Identifier: oai:oa.upm.es:50083
DOI: 10.1016/j.pmatsci.2017.04.006
Official URL: https://www.sciencedirect.com/science/article/pii/S0079642517300403
Deposited by: Memoria Investigacion
Deposited on: 30 Apr 2018 16:14
Last Modified: 25 Apr 2019 22:30
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