Laser crystallization of silicon and study by finite element modelling

Canteli Pérez Caballero, David and Muñoz Martín, David and Morales Furió, Miguel and Molpeceres Álvarez, Carlos Luis (2017). Laser crystallization of silicon and study by finite element modelling. In: "IRM, Industriales Research Meeting (2ª Ed) 2017", 04/04/2017-05/04/2017, Escuela Técnica Superior de Ingenieros Industriales, Universidad Politécnica de Madrid, Madrid. ISBN 978-84-16397-58-7. p. 1.

Description

Title: Laser crystallization of silicon and study by finite element modelling
Author/s:
  • Canteli Pérez Caballero, David
  • Muñoz Martín, David
  • Morales Furió, Miguel
  • Molpeceres Álvarez, Carlos Luis
Item Type: Presentation at Congress or Conference (Poster)
Event Title: IRM, Industriales Research Meeting (2ª Ed) 2017
Event Dates: 04/04/2017-05/04/2017
Event Location: Escuela Técnica Superior de Ingenieros Industriales, Universidad Politécnica de Madrid, Madrid
Title of Book: Industriales Research Meeting 2017
Date: April 2017
ISBN: 978-84-16397-58-7
Subjects:
Faculty: E.T.S.I. Diseño Industrial (UPM)
Department: Ingeniería Mecánica, Química y Diseño Industrial
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Laser crystallization of amorphous or microcrystalline silicon films to obtain high-quality polycrystalline films is one of the most promising methods for diminishing costs in the microelectronic and solar cells sectors. During a laser crystallization process light is partially absorbed by the amorphous silicon, heating the sample and, if the temperature rises high enough, causing the reorganization of the film structure into a crystalline one. In this work we show results on the crystallization of non-hydrogenated silicon thin-films by a continuous wave infrared laser, as well as a study of the process with a simple finite elements method (FEM) numerical model based in the dimensional non-linear heat transfer equation with a steady heat source.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainENE2013-48629-C4-3-RHELLOUniversidad Politécnica de Madrid-Centro LáserCélulas solares de silicio de alta eficiencia y bajo coste fabricadas a baja temperatura

More information

Item ID: 50980
DC Identifier: http://oa.upm.es/50980/
OAI Identifier: oai:oa.upm.es:50980
Official URL: http://www.etsii.upm.es/investigacion/irm17/index.es.htm
Deposited by: Memoria Investigacion
Deposited on: 24 May 2018 08:44
Last Modified: 24 May 2018 08:54
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