Finite element method modeling applied to laser crystallization of amorphous silicon

Canteli Pérez Caballero, David and Muñoz Martín, David and Morales Furió, Miguel and Molpeceres Álvarez, Carlos Luis (2017). Finite element method modeling applied to laser crystallization of amorphous silicon. In: "10ª Reunión Española de Optoelectrónica, OPTOEL17", 12/07/2017-14/07/2017, Santiago de Compostela, Galicia. pp. 400-402.

Description

Title: Finite element method modeling applied to laser crystallization of amorphous silicon
Author/s:
  • Canteli Pérez Caballero, David
  • Muñoz Martín, David
  • Morales Furió, Miguel
  • Molpeceres Álvarez, Carlos Luis
Item Type: Presentation at Congress or Conference (Article)
Event Title: 10ª Reunión Española de Optoelectrónica, OPTOEL17
Event Dates: 12/07/2017-14/07/2017
Event Location: Santiago de Compostela, Galicia
Title of Book: 10ª Reunión Española de Optoelectrónica, OPTOEL17
Date: July 2017
Subjects:
Freetext Keywords: Laser crystallization; polycrystalline silicon; FEM modelling
Faculty: E.T.S.I. Diseño Industrial (UPM)
Department: Ingeniería Mecánica, Química y Diseño Industrial
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The crystallization by laser of amorphous or microcrystalline silicon films allows to obtain thin, high-quality, polycrystalline Si films, being a very promising method for diminishing costs in the microelectronic and solar cells sectors. During a laser crystallization process, light is partially absorbed in the amorphous silicon film, heating the sample and, if the temperature rises high enough, causing the reorganization of the film structure into a crys- talline one. In this work we show both experimental results on the crystallization of non-hydrogenated silicon thin-films performed by a continuous wave infrared laser are included, as well as a study of the process with a simple finite elements (FEM) numerical model based in the dimensional non-linear heat transfer equation with a steady heat source.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainENE2013- 48629-C4-3-RHELLOUniversidad Politécnica de Madrid-Centro LáserCélulas solares de silicio de alta eficiencia y bajo coste fabricadas a baja temperatura
Government of SpainENE2016- 78933-C4-4-RCHENOCUniversidad Politécnica de Madrid-Centro LáserCélulas solares de heterounión de silicio de estructura no convencional

More information

Item ID: 50986
DC Identifier: http://oa.upm.es/50986/
OAI Identifier: oai:oa.upm.es:50986
Official URL: http://www.optoel2017.es/
Deposited by: Memoria Investigacion
Deposited on: 24 May 2018 08:53
Last Modified: 24 May 2018 08:53
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