AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation

Mirea, Teona and Olivares Roza, Jimena and Clement Lorenzo, Marta and Olivera Cardo, José Luis and Sangrador García, Jesús and Iborra Grau, Enrique (2017). AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation. In: "Proceedings of the 2017 Joint European Frequency and Time Forum and International Frequency Control Symposium", 09/07/2017 - 13/07/2017, Besancon, France. pp. 1-4. https://doi.org/10.1109/FCS.2017.8088947.

Description

Title: AlN-Solidly mounted resonators sustaining up to 1000 degrees C with TCF compensation
Author/s:
  • Mirea, Teona
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Olivera Cardo, José Luis
  • Sangrador García, Jesús
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: Proceedings of the 2017 Joint European Frequency and Time Forum and International Frequency Control Symposium
Event Dates: 09/07/2017 - 13/07/2017
Event Location: Besancon, France
Title of Book: Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
Date: 2017
Subjects:
Freetext Keywords: AlN-based SMR; high temperature; TCF compensation
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Surface acoustic wave (SAW) devices are currently the most exploited acoustic wave devices for high temperature applications due to their straightforward fabrication (few photolithographic steps) and ability for wireless interrogation. However they have some drawbacks like the destructive agglomeration of their electrodes, leading to low power handling, or their low operating frequencies (MHz range). In this work we present AlN-based solidly mounted resonators (SMRs) as an alternative to SAWs for high temperature applications. They offer the advantages of simplicity, high power handling and high operating frequencies. We prove that, with a proper design, SMRs can sustain temperatures as high as 1000°C with temperature coefficients of frequency significantly lower than SAW devices, which is crucial for sensing applications at high temperatures.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 54008
DC Identifier: http://oa.upm.es/54008/
OAI Identifier: oai:oa.upm.es:54008
DOI: 10.1109/FCS.2017.8088947
Official URL: https://ieeexplore.ieee.org/document/8088947
Deposited by: Memoria Investigacion
Deposited on: 04 Mar 2019 16:47
Last Modified: 04 Mar 2019 16:47
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