Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors

Gordillo Dagallier, Lorena and Olivares Roza, Jimena and Marco Dufort, Bruno and Olivera Cardo, José Luis and Escolano Moyano, José Miguel and Mirea, Teona and Clement Lorenzo, Marta and Iborra Grau, Enrique (2017). Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors. In: "Proceedings of the 2017 Joint European Frequency and Time Forum and International Frequency Control Symposium", 09/07/2017 - 13/072017, Besancon, France. pp. 1-4. https://doi.org/10.1109/FCS.2017.8088995.

Description

Title: Integration of multilayered graphene on AlN based resonators as a functionalization platform for biosensors
Author/s:
  • Gordillo Dagallier, Lorena
  • Olivares Roza, Jimena
  • Marco Dufort, Bruno
  • Olivera Cardo, José Luis
  • Escolano Moyano, José Miguel
  • Mirea, Teona
  • Clement Lorenzo, Marta
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: Proceedings of the 2017 Joint European Frequency and Time Forum and International Frequency Control Symposium
Event Dates: 09/07/2017 - 13/072017
Event Location: Besancon, France
Title of Book: 2017 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium (EFTF/IFCS)
Date: 2017
Subjects:
Freetext Keywords: Graphene integration; BAW resonators; gravimetric sensors; surface functionalization
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In this communication we present the integration of graphene on the top electrode of solidly mounted resonators based on piezoelectric AlN thin films for gravimetric sensor applications. Because its particular chemical structure, graphene shows great potential as a bio-functionalization platform. However, in order to be commercially viable, direct deposition on the resonators is preferred to transfer techniques. The high temperatures involved in graphene chemical vapor deposition make this integration complex. Specially developed acoustic resonators, which can withstand high temperatures, combined with the use of multilayered top electrodes for AlN resonators, allow a successful integration of graphene. Finally, oxygen plasma treatments to optimize the creation of defects on the graphene layer can be used to firmly bond receptors on its surface.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 54010
DC Identifier: http://oa.upm.es/54010/
OAI Identifier: oai:oa.upm.es:54010
DOI: 10.1109/FCS.2017.8088995
Official URL: https://ieeexplore.ieee.org/document/8088995
Deposited by: Memoria Investigacion
Deposited on: 04 Mar 2019 16:31
Last Modified: 04 Mar 2019 16:31
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