AlN-based solidly mounted resonators on glass substrates for high temperature applications

Mirea, Teona and Olivares Roza, Jimena and Clement Lorenzo, Marta and Sangrador García, Jesús and Iborra Grau, Enrique (2018). AlN-based solidly mounted resonators on glass substrates for high temperature applications. In: "IEEE International Ultrasonics Symposium (IUS 2018)", 22/10/2018 - 25/10/2018, Kobe, Japan. pp. 1-4. https://doi.org/10.1109/ULTSYM.2018.8579966.

Description

Title: AlN-based solidly mounted resonators on glass substrates for high temperature applications
Author/s:
  • Mirea, Teona
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Sangrador García, Jesús
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: IEEE International Ultrasonics Symposium (IUS 2018)
Event Dates: 22/10/2018 - 25/10/2018
Event Location: Kobe, Japan
Title of Book: IEEE International Ultrasonics Symposium (IUS 2018)
Título de Revista/Publicación: IEEE International Ultrasonics Symposium (IUS 2018)
Date: 2018
ISSN: 1051-0117
Subjects:
Freetext Keywords: Solidly mounted resonator; high temperature; AlN; glass substrates; in-situ measurements
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Acoustic wave resonators have been widely investigated for processes monitoring under harsh environments, particularly high temperatures, due to their low cost and good performance. One of the most explored devices are langasite-based surface acoustic wave sensors. Although they have proven to fulfill high temperature requirements, their long and narrow metallic strips can still suffer from destructive agglomeration. As an alternative, we propose using AlN-based solidly mounted resonators (SMRs). In previous works we proved these devices to sustain temperatures up to 1000ºC without degradation, however we have never tested their in-situ behavior at high temperatures. In this work we not only electrically characterize them in-situ (while annealing), but we prove Si substrates are not adequate when metallic strips are present on the resonator surface or these are integrated in filters or arrays, since Si becomes conductive above 250ºC and large capacitive parasites appear. To solve this, we used Corning glass substrates, which have proven to preserve the performance of SMRs up to 400ºC.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainTEC2017-84817-C2-1-RUnspecifiedUnspecifiedUnspecified

More information

Item ID: 55018
DC Identifier: http://oa.upm.es/55018/
OAI Identifier: oai:oa.upm.es:55018
DOI: 10.1109/ULTSYM.2018.8579966
Official URL: https://ieeexplore.ieee.org/document/8579966
Deposited by: Memoria Investigacion
Deposited on: 27 May 2019 17:19
Last Modified: 27 May 2019 17:19
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