Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers

Clement Lorenzo, Marta and Felmetsger, Valeriy and Mirea, Teona and Iborra Grau, Enrique (2018). Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers. In: "European Frequency and Time Forum (EFTF 2018)", 10/04/2018 - 12/042018, Turin, Italy. pp. 1-4. https://doi.org/10.1109/EFTF.2018.8408987.

Description

Title: Reactive sputtering of AlScN thin Ulms with variable Sc content on 200 mm wafers
Author/s:
  • Clement Lorenzo, Marta
  • Felmetsger, Valeriy
  • Mirea, Teona
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: European Frequency and Time Forum (EFTF 2018)
Event Dates: 10/04/2018 - 12/042018
Event Location: Turin, Italy
Title of Book: European Frequency and Time Forum (EFTF 2018)
Date: 2018
Subjects:
Freetext Keywords: AlScN films; 200 mm silicon sustrates; variation of Sc content
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Sc-doped AlN polycrystalline films are attractive active layers for high frequency (GHz range) acoustic resonators owing to the significant enlargement of the AlN piezoelectric activity with the increasing Sc content. To sputter homogenously doped AlScN films on 200 mm Si wafers we use a configurable cathode containing a variable number of embedded Sc pellets to fine tuning the Sc content in the films. The method was implemented in an Endeavor-AT™ cluster tool from OEM Group, adapted for sputtering on 200 mm wafers. 1 µm thick AlScN films with uniform Sc content (around 7 at.%), high crystal quality and good piezoelectric response have been sputtered over 200 mm production-level wafers.

More information

Item ID: 55094
DC Identifier: http://oa.upm.es/55094/
OAI Identifier: oai:oa.upm.es:55094
DOI: 10.1109/EFTF.2018.8408987
Official URL: https://ieeexplore.ieee.org/document/8408987
Deposited by: Memoria Investigacion
Deposited on: 27 May 2019 14:31
Last Modified: 27 May 2019 14:31
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