Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators

Mirea, Teona and Olivares Roza, Jimena and Clement Lorenzo, Marta and Iborra Grau, Enrique (2018). Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators. In: "European Frequency and Time Forum (EFTF 2018)", 12/07/2018, Turin, Italy. pp. 126-129. https://doi.org/10.1109/EFTF.2018.8409014.

Description

Title: Influence of the acoustic energy distribution on the in-liquid sensitivity of thin film electroacoustic resonators
Author/s:
  • Mirea, Teona
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: European Frequency and Time Forum (EFTF 2018)
Event Dates: 12/07/2018
Event Location: Turin, Italy
Title of Book: European Frequency and Time Forum (EFTF 2018)
Date: 2018
Subjects:
Freetext Keywords: AlN-based SMR; finite element method; in-liquid sensing
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In contrast to quartz crystal microbalances, the sensitivity of thin film bulk acoustic wave resonators (FBARs) is strongly dependent on all layers composing the composite structure. Previous studies of the pure mass sensitivity of suspended FBARs, proved that placing low acoustic impedance materials at the sensing surface of the device can enhance their sensitivity by carefully controlling the energy trapping effects. Here we extend those studies by investigating if the in-liquid sensitivity of shear-mode AlN-based solidly mounted resonators (SMRs), working at 2 GHz, display a similar dependence on the device configuration (top electrode thickness and material). We use the finite element method (FEM) and experimental results to demonstrate that if one is restricted by the readout circuit to a certain resonant frequency, the sensitivity of the devices (particularly in-liquid sensors or biosensors) can be boosted by proper design while preserving the initial frequency. This is possible since the variations in sensitivity are strongly dependent on the energy distribution within the whole resonant structure.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 55095
DC Identifier: http://oa.upm.es/55095/
OAI Identifier: oai:oa.upm.es:55095
DOI: 10.1109/EFTF.2018.8409014
Official URL: https://ieeexplore.ieee.org/document/8409014
Deposited by: Memoria Investigacion
Deposited on: 21 May 2019 17:50
Last Modified: 21 May 2019 17:50
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