Finding the upper mass limit until which gravimetric sensors preserve their original TCF and sensitivity

Mirea, Teona and Clement Lorenzo, Marta and Olivares Roza, Jimena and Iborra Grau, Enrique (2018). Finding the upper mass limit until which gravimetric sensors preserve their original TCF and sensitivity. In: "European Frequency and Time Forum (EFTF 2018)", 10/04/2018 - 12/04/2018, Turin, Italy. pp. 17-19. https://doi.org/10.1109/EFTF.2018.8408988.

Description

Title: Finding the upper mass limit until which gravimetric sensors preserve their original TCF and sensitivity
Author/s:
  • Mirea, Teona
  • Clement Lorenzo, Marta
  • Olivares Roza, Jimena
  • Iborra Grau, Enrique
Item Type: Presentation at Congress or Conference (Article)
Event Title: European Frequency and Time Forum (EFTF 2018)
Event Dates: 10/04/2018 - 12/04/2018
Event Location: Turin, Italy
Title of Book: European Frequency and Time Forum (EFTF 2018)
Date: 2018
Subjects:
Freetext Keywords: AlN-based SMR; mass sensitivity; temperature coefficient of frequency
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

Thin film bulk acoustic wave resonators (FBARs) have undoubtedly overcome the mass sensitivity of their predecessors quartz crystal microbalances. However, the mass sensitivity of FBARs strongly depends on all layers composing their complex structure. It has been proved that the addition of materials with different acoustic impedances at the sensing surface of the device can vary their sensitivity by energy redistribution effects. Such materials have been also used for temperature coefficient (TCF) compensation. Here we aim at studying up to which thickness of an added specific material on AlN-based solidly mounted resonators (SMRs), the initial mass sensitivity and TCF are still preserved. We prove that the sensitivity can be considered lineal up to the deposition of around 100 nm of SiO2, not affecting the detection of small masses in the pg range. On the contrary, TCF variation with few nm of SiO2 needs to be accurately controlled since it affects the detection in the pg range. For the detection of heavy masses, these effects can be considered negligible. This study should be performed for each particular case depending on the material accumulated on the device.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 55096
DC Identifier: http://oa.upm.es/55096/
OAI Identifier: oai:oa.upm.es:55096
DOI: 10.1109/EFTF.2018.8408988
Official URL: https://ieeexplore.ieee.org/document/8408988
Deposited by: Memoria Investigacion
Deposited on: 21 May 2019 16:20
Last Modified: 21 May 2019 16:21
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