Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor

Mirea, Teona and Olivares Roza, Jimena and Clement Lorenzo, Marta and Iborra Grau, Enrique (2019). Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor. "Sensors and Actuators A-Physical", v. 289 ; pp. 87-93. ISSN 0924-4247. https://doi.org/10.1016/j.sna.2019.02.012.

Description

Title: Impact of FBAR design on its sensitivity as in-liquid gravimetric sensor
Author/s:
  • Mirea, Teona
  • Olivares Roza, Jimena
  • Clement Lorenzo, Marta
  • Iborra Grau, Enrique
Item Type: Article
Título de Revista/Publicación: Sensors and Actuators A-Physical
Date: 22 February 2019
ISSN: 0924-4247
Volume: 289
Subjects:
Freetext Keywords: AlN-based thin film acoustic resonator; Liquid; Density-viscosity; Sensitivity
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

In contrast to quartz crystal microbalances, the sensitivity of thin film bulk acoustic wave resonators (FBARs) is strongly dependent on all films comprising the multilayered structure. Previous studies proved that placing low acoustic impedance materials at the sensing surface of longitudinal-mode FBARs operating in air can enhance their mass sensitivity by modifying the energy trapped at the sensing surface. Here we investigate if the in-liquid sensitivity to density-viscosity and mass of shear-mode AlN-based solidly mounted resonators displays a similar dependence on the device configuration. By using the finite element simulation method accompanied by experimental verifications we demonstrate that for a given value of the resonant frequency, the sensitivity can be boosted by a proper design of the devices. The results can be of application to in-liquid physical sensors or to gravimetric chemical or biological sensors.

Funding Projects

TypeCodeAcronymLeaderTitle
Government of SpainMAT2013-45957-RUnspecifiedUnspecifiedMateriales avanzados para biosensores basados en resonadores piezoeléctricos combinados con nanotubos de carbono y grafeno

More information

Item ID: 64304
DC Identifier: http://oa.upm.es/64304/
OAI Identifier: oai:oa.upm.es:64304
DOI: 10.1016/j.sna.2019.02.012
Official URL: https://www.sciencedirect.com/science/article/pii/S092442471831690X?via%3Dihub
Deposited by: Memoria Investigacion
Deposited on: 13 Mar 2021 11:12
Last Modified: 16 Apr 2021 22:30
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