A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring

Villa López, Farah H. and Cole, Marina and Iborra Grau, Enrique and Miguel Ramos, Mario de and Gardner, Julian W. (2019). A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring. In: "2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)", 23/06/2019 - 27/06/2019, Berlin, Germany. pp. 1242-1245. https://doi.org/10.1109/TRANSDUCERS.2019.8808790.

Description

Title: A Solidly Mounted Resonator With CMOS-Fabricated Acoustic Mirror For Low-Cost Air Quality Monitoring
Author/s:
  • Villa López, Farah H.
  • Cole, Marina
  • Iborra Grau, Enrique
  • Miguel Ramos, Mario de
  • Gardner, Julian W.
Item Type: Presentation at Congress or Conference (Article)
Event Title: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Event Dates: 23/06/2019 - 27/06/2019
Event Location: Berlin, Germany
Title of Book: 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)
Date: 2019
Subjects:
Freetext Keywords: Olidly mounted resonator; acoustic mirror; CMOS fabrication; SMR-IC integration; particle sensing; air quality monitoring
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Ingeniería Electrónica
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

This work presents a novel Solidly Mounted Resonator (SMR) device for use in a portable, low-cost and low power air quality monitor. The acoustic mirror, an essential part of the SMR device for energy confinement, is fabricated within a CMOS process, and advances upon current acoustic device technology. This CMOS-fabricated acoustic mirror will enable the device to be monolithically integrated and fabricated in high volume with reduced post-processing steps compared to the state-of-the-art acoustic based sensors. The CMOS-fabricated acoustic mirror demonstrated good reflectivity with a high quality factor of 500. Experimental results on particulate matter sensing with the CMOS based SMR sensor showed a response of 117 kHz/ng when detecting fine particles (<1 mu m).

Funding Projects

TypeCodeAcronymLeaderTitle
FP7611887MSPMATERIALS CENTER LEOBEN FORSCHUNG GMBHMulti-Sensor-Platform for Smart Building Management

More information

Item ID: 65252
DC Identifier: http://oa.upm.es/65252/
OAI Identifier: oai:oa.upm.es:65252
DOI: 10.1109/TRANSDUCERS.2019.8808790
Official URL: https://ieeexplore.ieee.org/document/8808790
Deposited by: Memoria Investigacion
Deposited on: 18 Apr 2021 10:31
Last Modified: 24 May 2021 07:36
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