Disclosing the polysilicon deposition process

Gonzalo del Coso, Gonzalo and Cañizo Nadal, Carlos del and Luque López, Antonio (2010). Disclosing the polysilicon deposition process. In: "25th European Photovoltaic Solar Energy Conference and Exhibition and 5th World Conference on Photovoltaic Energy, 25th EU PVSEC/5th WCPEC 2010", 06/09/2010 - 10/09/2010, Valencia, España. ISBN 3-936338-26-4.

Description

Title: Disclosing the polysilicon deposition process
Author/s:
  • Gonzalo del Coso, Gonzalo
  • Cañizo Nadal, Carlos del
  • Luque López, Antonio
Item Type: Presentation at Congress or Conference (Article)
Event Title: 25th European Photovoltaic Solar Energy Conference and Exhibition and 5th World Conference on Photovoltaic Energy, 25th EU PVSEC/5th WCPEC 2010
Event Dates: 06/09/2010 - 10/09/2010
Event Location: Valencia, España
Title of Book: CD-Rom Proceedings of the 25th European Photovoltaic Solar Energy Conference and Exhibition and 5th World Conference on Photovoltaic Energy, 25th EU PVSEC/5th WCPEC 2010
Date: 2010
ISBN: 3-936338-26-4
Subjects:
Freetext Keywords: Polysilicon, chemical route, trichlorosilane
Faculty: E.T.S.I. Telecomunicación (UPM)
Department: Electrónica Física
Creative Commons Licenses: Recognition - No derivative works - Non commercial

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Abstract

The chemical route for producing hyperpure silicon, referred to as polysilicon, is energy intensive. In this work two paths are analysed to reduce energy consumption during polysilicon deposition: reduce power loss and increase polysilicon productivity. The solutions proposed for reducing power loss are: enlarging the reactor capacities and increasing the wall reflectivity. The proposals for increasing the productivity are: working at the optimum deposition conditions, that maximises the polysilicon growth rate, and stopping the process at higher rod diameters. By doing so, the process uses the energy more efficiently.

More information

Item ID: 8277
DC Identifier: http://oa.upm.es/8277/
OAI Identifier: oai:oa.upm.es:8277
Official URL: http://www.photovoltaic-conference.com/
Deposited by: Memoria Investigacion
Deposited on: 27 Jul 2011 11:42
Last Modified: 20 Apr 2016 17:08
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