Export: Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators

Capilla Osorio, José and Olivares Roza, Jimena and Clement Lorenzo, Marta and Felmetsger, Valeriy and Devos, Arnaud (2011). Ta2O5/SiO2 insulating acoustic mirrors for AlN-based X-band BAW resonators. In: "IEEE International Ultrasonics Symposium 2011", 18/10/2011 - 21/10/2011, Orlando, EE. UU.. pp. 1704-1707. https://doi.org/10.1109/ULTSYM.2011.0425.

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