Export: Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators

Rodriguez Madrid, Juan and Fuentes Iriarte, Gonzalo and Araujo, Daniel and Villar, María Del Pilar and Williams, Oliver A. and Müller Sebert, W. and Calle Gómez, Fernando (2012). Optimization of AlN thin layers on diamond substrates for high frequency SAW resonators. "Materials letters", v. 66 (n. 1); pp. 339-342. ISSN 0167-577X. https://doi.org/10.1016/j.matlet.2011.09.003.

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