Export: Simulation and laser vibrometry characterization of piezoelectric AlN thin films

Hernando García, Jorge and Sánchez de Rojas Aldavero, José Luis and González Castilla, Sheila and Iborra Grau, Enrique and Ababneh, A. and Schmid, U. (2008). Simulation and laser vibrometry characterization of piezoelectric AlN thin films. "Journal of Applied Physics", v. 104 (n. 5); pp. 53502-1. ISSN 0021-8979. https://doi.org/10.1063/1.2957081.

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