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Export: Tecnologías de fabricación de microsistemas electromecánicos actuados piezoeléctricamente con nitruro de aluminio

González Castilla, Sheila (2009). Tecnologías de fabricación de microsistemas electromecánicos actuados piezoeléctricamente con nitruro de aluminio. Thesis (Doctoral), E.T.S.I. Telecomunicación (UPM).

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