Export: Advanced determination of piezoelectric properties of AlN thin films on silicon substrates

Sánchez de Rojas Aldavero, José Luis and Hernando García, Jorge and Ababneh, A. and Schmid, U. and Olivares Roza, Jimena and Iborra Grau, Enrique and Clement Lorenzo, Marta (2008). Advanced determination of piezoelectric properties of AlN thin films on silicon substrates. In: "2008 IEEE International Ultrasonics Symposium", 02/11/2008-05/11/2008, Beijing, China. ISBN 978-1-4244-2428-3. pp. 903-906. https://doi.org/10.1109/ULTSYM.2008.0218.

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