Export: The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators

Munir, Junaid and Miguel Ramos, Mario de and Lee, Hyunjoo Jenny and Saeed, Mohammad Alam and Iborra Grau, Enrique (2017). The influence of the acoustic reflector design on the temperature coefficient of frequency for shear and longitudinal mode AlN resonators. "Journal of microelectromechanical systems", v. 26 (n. 6); pp. 1306-1315. ISSN 1057-7157. https://doi.org/10.1109/JMEMS.2017.2737641.

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