RT Conference Proceedings
SR 00
A1 Martinez Rodrigo, Javier
A1 Barbagini, Francesca
A1 Bengoechea Encabo, Ana
A1 Albert, Steven
A1 Sánchez García, Miguel Angel
A1 Calleja Pardo, Enrique
T1 Fabrication of GaN nanorods by focused ion beam
YR 2011
FD 19/09/2011 - 23/09/2011
AB Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focusedionbeam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders
T2 37th International Conference on Micro and Nano Engineering
ED Berlín, Alemania
AV Published
LK http://oa.upm.es/12911/
UL http://www.mne2011.org/