eprintid: 12911
rev_number: 18
eprint_status: archive
userid: 1903
dir: disk0/00/01/29/11
datestamp: 2012-11-08 11:01:07
lastmod: 2016-04-21 12:14:15
status_changed: 2012-11-08 11:01:07
type: conference_item
metadata_visibility: show
item_issues_count: 0
creators_name: Martinez Rodrigo, Javier
creators_name: Barbagini, Francesca
creators_name: Bengoechea Encabo, Ana
creators_name: Albert, Steven
creators_name: Sánchez García, Miguel Angel
creators_name: Calleja Pardo, Enrique
title: Fabrication of GaN nanorods by focused ion beam
publisher: Elsevier
rights: by-nc-nd
ispublished: pub
subjects: electronica
subjects: fisica
full_text_status: public
pres_type: poster
abstract: Ordered arrays of III-Nitride nanocolumns are excellent candidates for the fabrication of nano-optoelectronic devices. Different technologies such as e-beam lithography or colloidal lithography, have been used to obtain ordered arrays. All these technologies have in common several processing steps that can affect the crystalline growth of the nanocolumns. In this work, we present a single lithographic step that permits to grow ordered GaN nanocolumns with different geometries. The patterning is based in the use of a focusedionbeam with different doses. With this method has been possible to create GaN nanopillars and nanocylinders
date_type: published
date: 2011
place_of_pub: Amsterdam
pagerange: 0-0
event_title: 37th International Conference on Micro and Nano Engineering
event_location: Berlín, Alemania
event_dates: 19/09/2011 - 23/09/2011
event_type: other
institution: Isom
department: otro
refereed: TRUE
book_title: Proceedings of 37th International Conference on Micro and Nano Engineering
official_url: http://www.mne2011.org/
citation:   Martinez Rodrigo, Javier and Barbagini, Francesca and Bengoechea Encabo, Ana and Albert, Steven and Sánchez García, Miguel Angel and Calleja Pardo, Enrique  (2011).  Fabrication of GaN nanorods by focused ion beam.  In: "37th International Conference on Micro and Nano Engineering", 19/09/2011 - 23/09/2011, Berlín, Alemania. pp..    
document_url: http://oa.upm.es/12911/1/INVE_MEM_2011_108195.pdf