?url_ver=Z39.88-2004&rft_val_fmt=info%3Aofi%2Ffmt%3Akev%3Amtx%3Adissertation&rft.au=Gonz%C3%A1lez+Castilla%2C+Sheila&rft.aulast=Gonz%C3%A1lez+Castilla&rft.aufirst=Sheila&rft.degree=Doctoral&rft.date=2009&rft.title=Tecnolog%C3%ADas+de+fabricaci%C3%B3n+de+microsistemas+electromec%C3%A1nicos+actuados+piezoel%C3%A9ctricamente+con+nitruro+de+aluminio&rft.inst=E.T.S.I.+Telecomunicaci%C3%B3n+(UPM)+%3Chttp%3A%2F%2Foa.upm.es%2Fview%2Finstitution%2FTelecomunicacion%2F%3E&rft.tpages=240