eprintid: 36757
rev_number: 6
eprint_status: archive
userid: 1903
dir: disk0/00/03/67/57
datestamp: 2015-12-09 17:16:27
lastmod: 2016-06-06 17:16:27
status_changed: 2015-12-09 17:16:27
type: conference_item
metadata_visibility: show
creators_name: Araujo Gay, Daniel
creators_name: Villar Castro, María del Pilar
creators_name: Lloret, Fernando
creators_name: Rodríguez Madrid, Juan Gabriel
creators_name: Fuentes Iriarte, Gonzalo
creators_name: Williams, Oliver A.
creators_name: Calle Gómez, Fernando
creators_id: pilar.villar@uca.es
creators_id: fernando.lloret@uca.es
creators_id: gonzalo.fuentes@ upm.es
creators_id: fernando.calle@upm.es
title: TEM study of the AlN grain orientation grown on NCD diamond substrate
rights: by-nc-nd
ispublished: pub
subjects: electronica
subjects: telecomunicaciones
full_text_status: public
pres_type: paper
abstract: Piezoelectric AlN layer grain orientation, grown by room 
temperature  reactive  sputtering,  is  analyzed  by transmission  electron  microscopy  (TEM).Two  types
of  samples are studied: (i) AlN grown on well-polished NCD 
(nano-crystalline  diamond)  diamond,  (ii)  AlN  grown  on  an  up-side down NCD layer previously grown on a Si substrate, i.e. diamond surface as smooth as that of Si substrates. The second set of sample show a faster lignment of their  AlN  grain  caxis  attributed  to  it  smoother  diamond free  surface.  No  grain  orientation  relationship  between diamond  substrate  grain  and  the  AlN  ones  is  evidenced, which  seems  to  indicate  the  preponderance  role  of  the surface substrate state.
date_type: published
date: 2014
pagerange: 1-2
event_title: 12th Expert Evaluation and Control of Compound Semiconductor Materials and Technologies (EXMATEC 2014)
event_location: Delphi, Greece
event_dates: 18/06/2014 - 20/06/2014
event_type: conference
institution: Isom
department: otro
refereed: TRUE
book_title: 12th Expert Evaluation and Control of Compound Semiconductor Materials and Technologies (EXMATEC 2014)
citation:   Araujo Gay, Daniel and Villar Castro, María del Pilar and Lloret, Fernando and Rodríguez Madrid, Juan Gabriel and Fuentes Iriarte, Gonzalo and Williams, Oliver A. and Calle Gómez, Fernando  (2014).  TEM study of the AlN grain orientation grown on NCD diamond substrate.  In: "12th Expert Evaluation and Control of Compound Semiconductor Materials and Technologies (EXMATEC 2014)", 18/06/2014 - 20/06/2014, Delphi, Greece. pp. 1-2.    
document_url: http://oa.upm.es/36757/1/INVE_MEM_2014_194002.pdf