Citation
Olivares Roza, Jimena and Malo Gomez, Javier and González Castilla, Sheila and Iborra Grau, Enrique and Clement Lorenzo, Marta and Sanz Hervás, Alfredo and Sanchez Rojas, J.L. and Sanz, P.
(2006).
Tunable mechanical resonator with aluminum nitride piezoelectric.
"Proceedings- Spie the International Society for Optical Engineering", v. 6186
(n. 1);
pp..
ISSN 0277-786X.
https://doi.org/10.1117/12.664444.
Abstract
The electromechanical response of piezoelectrically-actuated AlN micromachined bridge resonators has been characterized using laser interferometry and electrical admittance measurements. We compare the response of microbridges with different dimensions and buckling (induced by the initial residual stress of the layers). The resonance frequencies are in good agreement with numerical simulations of the electromechanical behavior of the structures. We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of builtin stress in the microbridge during its fabrication. Once the resonator is made, a DC bias added to the AC excitation signal allows to fine-tune the frequency. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 ?m-long microbridge.
